Development of an Optical Diaphragm Vacuum Gauge Using a Photothermal Vibration

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Original language	English
Pages (from-to)	140-142
Number of pages	3
Journal	Shinku/Journal of the Vacuum Society of Japan
Volume	35
Issue number	3
DOIs	https://doi.org/10.3131/jvsj.35.140
Publication status	Published - 1992

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title = "Development of an Optical Diaphragm Vacuum Gauge Using a Photothermal Vibration",

author = "Seiki Inaba and Kazuhiro Hane",

year = "1992",

doi = "10.3131/jvsj.35.140",

language = "English",

volume = "35",

pages = "140--142",

journal = "Shinku/Journal of the Vacuum Society of Japan",

issn = "0559-8516",

publisher = "Shinku Kyokai",

number = "3",

}

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T1 - Development of an Optical Diaphragm Vacuum Gauge Using a Photothermal Vibration

AU - Inaba, Seiki

AU - Hane, Kazuhiro

PY - 1992

Y1 - 1992

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U2 - 10.3131/jvsj.35.140

DO - 10.3131/jvsj.35.140

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AN - SCOPUS:85024444528

SN - 0559-8516

VL - 35

SP - 140

EP - 142

JO - Shinku/Journal of the Vacuum Society of Japan

JF - Shinku/Journal of the Vacuum Society of Japan

IS - 3

ER -