Development of Ceramic Nanocoating by Electron Beam Physical Vapor Deposition

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	363-367
Number of pages	5
Journal	Shinku/Journal of the Vacuum Society of Japan
Volume	49
Issue number	6
DOIs	https://doi.org/10.3131/jvsj.49.363
Publication status	Published - 2006 Jan

ASJC Scopus subject areas

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title = "Development of Ceramic Nanocoating by Electron Beam Physical Vapor Deposition",

author = "Hideaki Matsubara",

year = "2006",

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