Development of combinatorial PLD-STM system for the quick nano-fabrication and evaluation

Y. Matsumoto, T. Ohsawa, R. Takahashi, H. Koinuma

Research output: Contribution to journalConference articlepeer-review

1 Citation (Scopus)


A combinatorial PLD-STM system has been developed for quick nano-fabrication and evaluation of epitaxial thin films and catalysts. Through a gate valve, a combinatorial nano-materials library fabricated in a PLD chamber can be transferred to a surface analysis chamber equipped with LEED and STM. The LEED pattern and atomically resolved STM image for systematically varied samples in the library are measured by locating one sample to another at the electron beam and STM probe position. In this way, we have quickly elucidated the initial growth process of SrO on SrTiO3(001) as well as structures of transition metal deposited TiO2 anatase. The combinatorial PLD-STM system has been verified to be very efficient technique for the exploration and optimization of nano-materials.

Original languageEnglish
Pages (from-to)3-11
Number of pages9
JournalMaterials Research Society Symposium - Proceedings
Publication statusPublished - 2002
EventCombinatorial and Artificial Intelligence Methods in Materials Science - Boston, MA, United States
Duration: 2001 Nov 262001 Nov 29


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