TY - JOUR
T1 - Development of double layered thickness-shear resonator using langasite-type piezoelectric single crystal
AU - Owada, Yusuke
AU - Ohashi, Yuji
AU - Omote, Masaya
AU - Yokota, Yuui
AU - Kurosawa, Shunsuke
AU - Kamada, Kei
AU - Sato, Hiroki
AU - Toyoda, Satoshi
AU - Yoshino, Masao
AU - Yamaji, Akihiro
AU - Yoshikawa, Akira
N1 - Funding Information:
This work is based on results obtained from a project commissioned by the New Energy and Industrial Technology Development Organization (NEDO).
Publisher Copyright:
© 2020 The Japan Society of Applied Physics.
PY - 2020/7/1
Y1 - 2020/7/1
N2 - A novel device structure "double layered thickness-shear resonator" was proposed to improve the temperature characteristics of a bulk acoustic wave resonator. In order to design the double layered resonator, optimal combination of cut angles and thickness ratio of the substrates were determined from calculations using material constants and their temperature coefficients measured for a Ca3TaGa3Si2O14 (CTGS) single crystal. Based on the results, a double layered resonator was fabricated by directly bonding two CTGS substrates with cut angles of 122°Y and 171°Y under the thickness ratio of 0.248. As a result, the double layered resonator operated successfully at a fundamental mode of around 7.5 MHz like a normal resonator exhibiting temperature compensation effect. The mechanism of the deviation from the expected value observed in the measured temperature dependence of the frequency changes was discussed using the model of the wave propagation and the electric field generated in the double layer structure.
AB - A novel device structure "double layered thickness-shear resonator" was proposed to improve the temperature characteristics of a bulk acoustic wave resonator. In order to design the double layered resonator, optimal combination of cut angles and thickness ratio of the substrates were determined from calculations using material constants and their temperature coefficients measured for a Ca3TaGa3Si2O14 (CTGS) single crystal. Based on the results, a double layered resonator was fabricated by directly bonding two CTGS substrates with cut angles of 122°Y and 171°Y under the thickness ratio of 0.248. As a result, the double layered resonator operated successfully at a fundamental mode of around 7.5 MHz like a normal resonator exhibiting temperature compensation effect. The mechanism of the deviation from the expected value observed in the measured temperature dependence of the frequency changes was discussed using the model of the wave propagation and the electric field generated in the double layer structure.
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U2 - 10.35848/1347-4065/ab80da
DO - 10.35848/1347-4065/ab80da
M3 - Article
AN - SCOPUS:85084189203
SN - 0021-4922
VL - 59
JO - Japanese Journal of Applied Physics
JF - Japanese Journal of Applied Physics
IS - SK
M1 - SKKC03
ER -