Development of full-field x-ray phase-tomographic microscope based on laboratory x-ray source

H. Takano, Y. Wu, A. Momose

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

9 Citations (Scopus)


An X-ray phase tomographic microscope that can quantitatively measure the refractive index of a sample in three dimensions with a high spatial resolution was developed by installing a Lau interferometer consisting of an absorption grating and a π/2 phase grating into the optics of an X-ray microscope. The optics comprises a Cu rotating anode X-ray source, capillary condenser optics, and a Fresnel zone plate for the objective. The microscope has two optical modes: a large-field-of-view mode (field of view: 65 μm × 65 μm) and a high-resolution mode (spatial resolution: 50 nm). Optimizing the parameters of the interferometer yields a self-image of the phase grating with ∼60% visibility. Through the normal fringe-scanning measurement, a twin phase image, which has an overlap of two phase image of opposite contrast with a shear distance much larger than system resolution, is generated. Although artifacts remain to some extent currently when a phase image is calculated from the twin phase image, this system can obtain high-spatial-resolution images resolving 50-nm structures. Phase tomography with this system has also been demonstrated using a phase object.

Original languageEnglish
Title of host publicationDevelopments in X-Ray Tomography XI
EditorsGe Wang, Bert Muller
ISBN (Electronic)9781510612396
Publication statusPublished - 2017
EventDevelopments in X-Ray Tomography XI 2017 - San Diego, United States
Duration: 2017 Aug 82017 Aug 10

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X


ConferenceDevelopments in X-Ray Tomography XI 2017
Country/TerritoryUnited States
CitySan Diego


  • Grating interferometer
  • X-ray microscope
  • X-ray phase imaging
  • X-ray tomography


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