@inproceedings{22e16aa1f30f4481b2b402f19d610a2d,
title = "Development of full-field x-ray phase-tomographic microscope based on laboratory x-ray source",
abstract = "An X-ray phase tomographic microscope that can quantitatively measure the refractive index of a sample in three dimensions with a high spatial resolution was developed by installing a Lau interferometer consisting of an absorption grating and a π/2 phase grating into the optics of an X-ray microscope. The optics comprises a Cu rotating anode X-ray source, capillary condenser optics, and a Fresnel zone plate for the objective. The microscope has two optical modes: a large-field-of-view mode (field of view: 65 μm × 65 μm) and a high-resolution mode (spatial resolution: 50 nm). Optimizing the parameters of the interferometer yields a self-image of the phase grating with ∼60% visibility. Through the normal fringe-scanning measurement, a twin phase image, which has an overlap of two phase image of opposite contrast with a shear distance much larger than system resolution, is generated. Although artifacts remain to some extent currently when a phase image is calculated from the twin phase image, this system can obtain high-spatial-resolution images resolving 50-nm structures. Phase tomography with this system has also been demonstrated using a phase object.",
keywords = "Grating interferometer, X-ray microscope, X-ray phase imaging, X-ray tomography",
author = "H. Takano and Y. Wu and A. Momose",
note = "Funding Information: This work was supported by JST ERATO (grant No. JPMJER1403). The authors thank Carl Zeiss X-Ray Microscopy Inc. (Pleasanton, CA, USA) for help in installing the grating interferometer into the ZEISS Xradia 800 Ultra X-ray microscope. Publisher Copyright: {\textcopyright} 2017 SPIE.; Developments in X-Ray Tomography XI 2017 ; Conference date: 08-08-2017 Through 10-08-2017",
year = "2017",
doi = "10.1117/12.2273534",
language = "English",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Ge Wang and Bert Muller",
booktitle = "Developments in X-Ray Tomography XI",
address = "United States",
}