TY - GEN
T1 - Development of high-quality graphene nano-ribbon fabrication process for high sensitivity strain sensor
AU - Nakagawa, Ryohei
AU - Suzuki, Ken
AU - Miura, Hideo
N1 - Funding Information:
This research activity has been supported partially by Japanese Grants-in-aid for Scientific Research, and Tohoku University. This research was supported partly by JSPS KAKENHI Grant Number JP16H06357.
Publisher Copyright:
© 2017 IEEE.
PY - 2017/7/1
Y1 - 2017/7/1
N2 - A strain sensor having large deformability and high sensitivity is strongly demanded. In order to fabricate a sensing part of a next generation strain sensor, graphene nanoribbon (GNR) fabrication process was developed. It was predicted that GNR has high strain sensitivity based on piezoresistivitve effect when its width is less than 70 nm. In this study, top-down approach was applied to fabricate the GNR. At first, in order to synthesize a high-quality graphene sheet, acetylene-based LPCVD (low pressure chemical vapor deposition) using Cu foil was developed. After the synthesis, a graphene sheet was transferred onto a Si/SiO2 substrate and the quality of the transferred graphene sheet was evaluated by using Raman spectroscopy. Finally, GNR and metallic electrodes were fabricated by applying MEMS techniques such as electron beam evaporation using stencil mask and electron beam lithography.
AB - A strain sensor having large deformability and high sensitivity is strongly demanded. In order to fabricate a sensing part of a next generation strain sensor, graphene nanoribbon (GNR) fabrication process was developed. It was predicted that GNR has high strain sensitivity based on piezoresistivitve effect when its width is less than 70 nm. In this study, top-down approach was applied to fabricate the GNR. At first, in order to synthesize a high-quality graphene sheet, acetylene-based LPCVD (low pressure chemical vapor deposition) using Cu foil was developed. After the synthesis, a graphene sheet was transferred onto a Si/SiO2 substrate and the quality of the transferred graphene sheet was evaluated by using Raman spectroscopy. Finally, GNR and metallic electrodes were fabricated by applying MEMS techniques such as electron beam evaporation using stencil mask and electron beam lithography.
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U2 - 10.1109/IMPACT.2017.8255897
DO - 10.1109/IMPACT.2017.8255897
M3 - Conference contribution
AN - SCOPUS:85045152670
T3 - Proceedings of Technical Papers - International Microsystems, Packaging, Assembly, and Circuits Technology Conference, IMPACT
SP - 214
EP - 217
BT - IMPACT 2017 - 12th International Microsystems, Packaging, Assembly and Circuits Technology Conference, Proceedings
PB - IEEE Computer Society
T2 - 12th International Microsystems, Packaging, Assembly and Circuits Technology Conference, IMPACT 2017
Y2 - 25 October 2017 through 27 October 2017
ER -