Development of high-yield fabrication technique for MEMS-PhC devices

A. Higo, S. Iwamoto, S. Ishida, Y. Arakawa, M. Tokushima, A. Gomyo, H. Yamada, H. Fujita, H. Toshiyoshi

Research output: Contribution to journalArticlepeer-review

4 Citations (Scopus)


We propose a high-yield fabrication processing technique for the MEMS (micro electro mechanical system) modulators integrated with two-dimensional photonic crystal waveguides. Polysilicon microactuators for evanescent modulation was successfully developed by using the vapor hydrofluoric-acid releasing technique for stiction-free sacrificial release, during which the SOI photonic-crystal waveguides were protected under the LPCVD silicon nitride film. Post-release anneal was found to be needed to remove the byproduct made by the reaction of hydrofluoric acid with silicon nitride film. Preliminary optical modulation result (-2 dB modulation with 86 V) was experimentally obtained.

Original languageEnglish
Pages (from-to)39-43
Number of pages5
JournalIEICE Electronics Express
Issue number3
Publication statusPublished - 2006 Feb 10
Externally publishedYes


  • 2-dimensinal photonic crystal waveguide
  • Electrostatic actuators
  • Optical modulators
  • Photonic integrated circuits

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Electrical and Electronic Engineering


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