Development of high-yield fabrication technique for MEMS-PhC devices

A. Higo; S. Iwamoto; S. Ishida; Y. Arakawa; M. Tokushima; A. Gomyo; H. Yamada; H. Fujita; H. Toshiyoshi

doi:10.1587/elex.3.39

Development of high-yield fabrication technique for MEMS-PhC devices

A. Higo, S. Iwamoto, S. Ishida, Y. Arakawa, M. Tokushima, A. Gomyo, H. Yamada, H. Fujita, H. Toshiyoshi

Research output: Contribution to journal › Article › peer-review

4 Citations (Scopus)

Abstract

We propose a high-yield fabrication processing technique for the MEMS (micro electro mechanical system) modulators integrated with two-dimensional photonic crystal waveguides. Polysilicon microactuators for evanescent modulation was successfully developed by using the vapor hydrofluoric-acid releasing technique for stiction-free sacrificial release, during which the SOI photonic-crystal waveguides were protected under the LPCVD silicon nitride film. Post-release anneal was found to be needed to remove the byproduct made by the reaction of hydrofluoric acid with silicon nitride film. Preliminary optical modulation result (-2 dB modulation with 86 V) was experimentally obtained.

Original language	English
Pages (from-to)	39-43
Number of pages	5
Journal	IEICE Electronics Express
Volume	3
Issue number	3
DOIs	https://doi.org/10.1587/elex.3.39
Publication status	Published - 2006 Feb 10
Externally published	Yes

Keywords

2-dimensinal photonic crystal waveguide
Electrostatic actuators
Optical modulators
Photonic integrated circuits

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Electrical and Electronic Engineering

Access to Document

10.1587/elex.3.39

Cite this

@article{7f330866cf844f6fac4ad3b8c0d74b8c,

title = "Development of high-yield fabrication technique for MEMS-PhC devices",

abstract = "We propose a high-yield fabrication processing technique for the MEMS (micro electro mechanical system) modulators integrated with two-dimensional photonic crystal waveguides. Polysilicon microactuators for evanescent modulation was successfully developed by using the vapor hydrofluoric-acid releasing technique for stiction-free sacrificial release, during which the SOI photonic-crystal waveguides were protected under the LPCVD silicon nitride film. Post-release anneal was found to be needed to remove the byproduct made by the reaction of hydrofluoric acid with silicon nitride film. Preliminary optical modulation result (-2 dB modulation with 86 V) was experimentally obtained.",

keywords = "2-dimensinal photonic crystal waveguide, Electrostatic actuators, Optical modulators, Photonic integrated circuits",

author = "A. Higo and S. Iwamoto and S. Ishida and Y. Arakawa and M. Tokushima and A. Gomyo and H. Yamada and H. Fujita and H. Toshiyoshi",

year = "2006",

month = feb,

day = "10",

doi = "10.1587/elex.3.39",

language = "English",

volume = "3",

pages = "39--43",

journal = "IEICE Electronics Express",

issn = "1349-2543",

publisher = "The Institute of Electronics, Information and Communication Engineers (IEICE)",

number = "3",

}

TY - JOUR

T1 - Development of high-yield fabrication technique for MEMS-PhC devices

AU - Higo, A.

AU - Iwamoto, S.

AU - Ishida, S.

AU - Arakawa, Y.

AU - Tokushima, M.

AU - Gomyo, A.

AU - Yamada, H.

AU - Fujita, H.

AU - Toshiyoshi, H.

PY - 2006/2/10

Y1 - 2006/2/10

N2 - We propose a high-yield fabrication processing technique for the MEMS (micro electro mechanical system) modulators integrated with two-dimensional photonic crystal waveguides. Polysilicon microactuators for evanescent modulation was successfully developed by using the vapor hydrofluoric-acid releasing technique for stiction-free sacrificial release, during which the SOI photonic-crystal waveguides were protected under the LPCVD silicon nitride film. Post-release anneal was found to be needed to remove the byproduct made by the reaction of hydrofluoric acid with silicon nitride film. Preliminary optical modulation result (-2 dB modulation with 86 V) was experimentally obtained.

AB - We propose a high-yield fabrication processing technique for the MEMS (micro electro mechanical system) modulators integrated with two-dimensional photonic crystal waveguides. Polysilicon microactuators for evanescent modulation was successfully developed by using the vapor hydrofluoric-acid releasing technique for stiction-free sacrificial release, during which the SOI photonic-crystal waveguides were protected under the LPCVD silicon nitride film. Post-release anneal was found to be needed to remove the byproduct made by the reaction of hydrofluoric acid with silicon nitride film. Preliminary optical modulation result (-2 dB modulation with 86 V) was experimentally obtained.

KW - 2-dimensinal photonic crystal waveguide

KW - Electrostatic actuators

KW - Optical modulators

KW - Photonic integrated circuits

UR - http://www.scopus.com/inward/record.url?scp=33947393140&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=33947393140&partnerID=8YFLogxK

U2 - 10.1587/elex.3.39

DO - 10.1587/elex.3.39

M3 - Article

AN - SCOPUS:33947393140

SN - 1349-2543

VL - 3

SP - 39

EP - 43

JO - IEICE Electronics Express

JF - IEICE Electronics Express

IS - 3

ER -

Development of high-yield fabrication technique for MEMS-PhC devices

Abstract

Keywords

ASJC Scopus subject areas

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