TY - JOUR
T1 - Development of micro-beam NRA for 3D-mapping of hydrogen distribution in solids
T2 - Application of tapered glass capillary to 6 MeV 15N ion
AU - Sekiba, D.
AU - Yonemura, H.
AU - Nebiki, T.
AU - Wilde, M.
AU - Ogura, S.
AU - Yamashita, H.
AU - Matsumoto, M.
AU - Kasagi, J.
AU - Iwamura, Y.
AU - Itoh, T.
AU - Matsuzaki, H.
AU - Narusawa, T.
AU - Fukutani, K.
PY - 2008/9
Y1 - 2008/9
N2 - A micro-beam NRA system, by means of a resonant nuclear reaction 1H(15N, αγ)12C, has been developed for the purpose of the 3D mapping of the hydrogen distribution in solids. To obtain the tens μm size of the beam spot, the combination of the newly proposed tapered glass capillary and a conventional quadrupole magnetic lens is employed. An Y patterned film on a substrate is prepared as an application of the developed system. The 6 MeV 15N beam focused by glass capillaries down to 50 μm successfully shows the hydrogen distribution. The in-plane NRA profile implies that the beam emitted from the glass capillary outlet is parallel, although the original beam has a considerable divergence. The NRA measurements in the 103 Pa N2 atmosphere due to the low gas conductance of the glass capillary is also demonstrated.
AB - A micro-beam NRA system, by means of a resonant nuclear reaction 1H(15N, αγ)12C, has been developed for the purpose of the 3D mapping of the hydrogen distribution in solids. To obtain the tens μm size of the beam spot, the combination of the newly proposed tapered glass capillary and a conventional quadrupole magnetic lens is employed. An Y patterned film on a substrate is prepared as an application of the developed system. The 6 MeV 15N beam focused by glass capillaries down to 50 μm successfully shows the hydrogen distribution. The in-plane NRA profile implies that the beam emitted from the glass capillary outlet is parallel, although the original beam has a considerable divergence. The NRA measurements in the 103 Pa N2 atmosphere due to the low gas conductance of the glass capillary is also demonstrated.
KW - Glass capillary
KW - Heavy ion
KW - Hydrogen detection
KW - Ion beam focusing
KW - Micro-beam
KW - NRA
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U2 - 10.1016/j.nimb.2008.06.032
DO - 10.1016/j.nimb.2008.06.032
M3 - Article
AN - SCOPUS:51149113321
SN - 0168-583X
VL - 266
SP - 4027
EP - 4036
JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
IS - 18
ER -