TY - GEN
T1 - Development of MWCNT-based strain sensor using flexible substrate
AU - Yumoto, Kanji
AU - Suzuki, Ken
AU - Miura, Hideo
N1 - Publisher Copyright:
© 2016 IEEE.
PY - 2016/11/28
Y1 - 2016/11/28
N2 - Highly sensitive two-dimensional strain sensor, which consists of area-arrayed fine bundles of multi-walled carbon nanotubes (MWCNTs), has been developed by applying MEMS technology. Area-arrayed MWCNT bundles were grown on a substrate by CVD technique. When a compressive load was applied to the bundle, the electrical resistance of the bundle increased monotonically due to the change of the electronic band structure of the deformed CNT. By measuring the change of the resistance of each bundle, the two-dimensional distribution of the applied pressure was detected precisely. In the previous study, it was found that MWCNT bundle deformed repeatedly in the strain range up to 60%. Thus, in this study, the deformation behaviour of the MWCNT bundle on a flexible substrate, which is effective for rough surface, was observed. It was confirmed that the MWCNT bundle coated by PDMS showed elastic deformation under the application of axial compressive load of 60%, and the allowable maximum load was 3 mN.
AB - Highly sensitive two-dimensional strain sensor, which consists of area-arrayed fine bundles of multi-walled carbon nanotubes (MWCNTs), has been developed by applying MEMS technology. Area-arrayed MWCNT bundles were grown on a substrate by CVD technique. When a compressive load was applied to the bundle, the electrical resistance of the bundle increased monotonically due to the change of the electronic band structure of the deformed CNT. By measuring the change of the resistance of each bundle, the two-dimensional distribution of the applied pressure was detected precisely. In the previous study, it was found that MWCNT bundle deformed repeatedly in the strain range up to 60%. Thus, in this study, the deformation behaviour of the MWCNT bundle on a flexible substrate, which is effective for rough surface, was observed. It was confirmed that the MWCNT bundle coated by PDMS showed elastic deformation under the application of axial compressive load of 60%, and the allowable maximum load was 3 mN.
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U2 - 10.1109/IEMT.2016.7761980
DO - 10.1109/IEMT.2016.7761980
M3 - Conference contribution
AN - SCOPUS:85006064978
T3 - Proceedings of the IEEE/CPMT International Electronics Manufacturing Technology (IEMT) Symposium
BT - 2016 IEEE 37th International Electronics Manufacturing Technology, IEMT 2016 and 18th Electronics Materials and Packaging Conference, EMAP 2016
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 37th IEEE International Electronics Manufacturing Technology, IEMT 2016 and 18th Electronics Materials and Packaging Conference, EMAP 2016
Y2 - 20 September 2016 through 22 September 2016
ER -