@inproceedings{c11333847a7d4bb6a30b31a7f4893616,
title = "Development of Nanomechanical Multisensory Arrays for Detection of Hazardous Volatile Materials and Gases",
abstract = "A Si-based miniatured nanomechanical multisensory array has been developed to detect the hazardous complex gases. Four sensors with four functional polymers have been integrated on one chip for multi-detector based on pattern recognition. The unique suspended-type design and the uses of multifunctional polymers of the sensor arrays translate the physical parameters of adsorption to nanomechanical strain, which generates stress on piezoresistive sensors and produces electrical signals. As different gas molecules generate different degrees of physical strain, various sensors for a wide range of target gases can be designed. In particular, the highly responsive sensors to different volatile materials and hazardous gases are demonstrated.",
keywords = "Multi-sensory, Nanomechanical, Piezoresistive, Surface strain",
author = "Momin, {Md Abdul} and Zhuqing Wang and Masaya Toda and Mai Yamazaki and Krzysztof Moorthi and Yasuaki Kawaguchi and Takahito Ono",
note = "Publisher Copyright: {\textcopyright} 2022 IEEE.; 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022 ; Conference date: 09-01-2022 Through 13-01-2022",
year = "2022",
doi = "10.1109/MEMS51670.2022.9699548",
language = "English",
series = "IEEE Symposium on Mass Storage Systems and Technologies",
publisher = "IEEE Computer Society",
pages = "732--734",
booktitle = "35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022",
}