Development of scanning-type X-ray fourier transform holography

K. Nomura, N. Awaji, S. Doi, S. Isogami, K. Kodama, T. Nakamura, M. Suzuki, M. Tsunoda

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

2 Citations (Scopus)


We developed a scanning-type x-ray Fourier transform holography and applied it to both the soft and hard x-ray regions. For this approach, we prepared the holography mask and the imaging object separately and placed them in contact with each other. In this configuration, the illuminated area can be changed by moving the sample relative to the mask via the translation stage. In this case, an image can be recovered by Fourier inversion of the hologram as in the usual lensless Fourier transform holography. This method also reduces the relative vibration between the mask and sample, and provides good quality images. The method was successfully applied to large-area imaging of magnetic domains in a Co/Pt perpendicular magnetic film with soft x-rays. In addition, cross-sectional imaging of Cu interconnect lines was performed in the hard x-ray region.

Original languageEnglish
Title of host publication10th International Conference on X-Ray Microscopy
Number of pages4
Publication statusPublished - 2010
Event10th International Conference on X-Ray Microscopy - Chicago, IL, United States
Duration: 2010 Aug 152010 Aug 20

Publication series

NameAIP Conference Proceedings
ISSN (Print)0094-243X
ISSN (Electronic)1551-7616


Conference10th International Conference on X-Ray Microscopy
Country/TerritoryUnited States
CityChicago, IL


  • hard x-ray
  • imaging
  • magnetic domain
  • soft x-ray
  • X-ray Fourier transform holography


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