@inproceedings{ee356dc5ab68424abff13e3d5430b617,
title = "Development of the micro-mirror with large scaning angle using FE-based metallic glass thin film",
abstract = "In order to realize the large tilting angle of micro-mirror devices without mechanical failure, the mirror structure was fabricated using a Fe-based metallic glass (MG) thin film. The micro-mirrors with mirror-plate diameter of 900m and torsion bar dimensions; length 250m, width 30m and thickness 3m were fabricated. Extremely large tilting angle of 270 was obtained on activation of mirror by using a permanent magnet. And when 93mA was applied to the driving set-up using Lorentz force, over 75 of mechanical angle was obtained. Large tilting angle of micro-mirror is due to the torsion bar which was fabricated with Fe-based MG thin film that has large elastic strain limit, excellent magnetic and mechanical properties.",
keywords = "MEMS, Metallic glass, Micro-mirror",
author = "Lee, {Jae Wung} and Lin, {Yu Ching} and Neelam Kaushik and Parmanand Sharma and Akihisa Inoue and Masayoshi Esashi and Thomas Gessner",
year = "2011",
month = sep,
day = "1",
doi = "10.1109/TRANSDUCERS.2011.5969618",
language = "English",
isbn = "9781457701573",
series = "2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11",
pages = "2912--2915",
booktitle = "2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11",
note = "2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 ; Conference date: 05-06-2011 Through 09-06-2011",
}