Development of variable temperature scanning microwave microscope for high throughput materials characterization

Noriaki Okazaki, Sohei Okazaki, Ryota Takahashi, Makoto Murakami, Parhal Ahmet, Nobuyuki Kakiuchi, Hitoshi Furusho, Taito Nishino, Yutaka Furubayashi, Tomoteru Fukumura, Yuji Mastumoto, Masashi Kawasaki, Toyohiro Chikyow, Hideomi Koinuma, Tetsuya Hasegawa

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Citation (Scopus)


We developed a variable-temperature scanning microwave microscope (VT-SμM) that can perform high-throughput materials characterization in the temperature range between 4K and room temperature. As a sensor probe we used a high-Q coaxial cavity resonator, which was mounted on the low-temperature stage to allow variable-temperature measurements. We carried out systematic studies on the thermal degradation of the conducting polymers using the combinatorial libraries of polyaniline and polythiophene thin films, which showed rapid decrease of conductivity above the heating temperatures of 300°C and 250°C, respectively. The low-temperature performance of the VT-SμM was demonstrated by the measurement of composition-spread Nd1-xSr xMnO3 thin film, for which we succeeded in detecting the clear metal-insulator transition at 100K. We also propose a simple and easy method for the quantitative analysis of conductive thin films, by using the standard composition-spread thin films of Ti1-xNbxO 2.

Original languageEnglish
Title of host publicationMaterials Research Society Symposium Proceedings
Number of pages11
Publication statusPublished - 2006
EventCombinatorial Methods and Informatics in Materials Science - Boston, MA, United States
Duration: 2005 Nov 282005 Dec 1

Publication series

NameMaterials Research Society Symposium Proceedings
ISSN (Print)0272-9172


ConferenceCombinatorial Methods and Informatics in Materials Science
Country/TerritoryUnited States
CityBoston, MA


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