This paper reports on the development of a diamond multi-probe for ultra-high-density ferroelectric data storage based on scanning nonlinear dielectric microscopy (SNDM), which is a technique for determining polarized directions in ferroelectric domains by measuring a nonlinear dielectric constant with a inductance-capacitance resonator. SNDM has a capability of both reading and writing nano-sized polarized ferroelectric domain information at a high speed, since the SNDM technique is a purely electrical method. Boron-doped diamond synthesized by hot-filament chemical vapor deposition is chosen as a conductive and robust probe material. Probes are fabricated by using a silicon lost mold technique and selective growth method. We present the fabrication of the diamond multi-probe and data storage experiments using a ferroelectric LiTaO3 thin film. It is demonstrated that boron-doped diamond probe can be used for data storage based on SNDM.
|Number of pages
|Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
|Published - 2004
|17th IEEE International Conference on Micro Electro Mechanical Systems (MEMS): Maastricht MEMS 2004 Technical Digest - Maastricht, Netherlands
Duration: 2004 Jan 25 → 2004 Jan 29