Diamond probe with silicon-based piezo strain gauge for high density data storage using scanning nonlinear dielectric microscopy

Hirokazu Takahashi; Atsushi Onoe; Takahito Ono; Yasuo Cho; Masayoshi Esashi

doi:10.1109/SENSOR.2005.1497328

Diamond probe with silicon-based piezo strain gauge for high density data storage using scanning nonlinear dielectric microscopy

Hirokazu Takahashi, Atsushi Onoe, Takahito Ono, Yasuo Cho, Masayoshi Esashi

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

3 Citations (Scopus)

Abstract

This paper reports on the development of diamond probes integrated with a Si-based piezoresistive strain gauge for ultra-high-density ferroelectric data storage beyond 1 Tbit/inch² with scanning nonlinear dielectric microscopy (SNDM). Only the tip of the probe was composed of diamond, and a cantilever integrated with the piezoresistive sensor was made of Si. The electrophoretic deposition process for diamond growth improved the production yield for sharp diamond tips. Topographic imaging using AFM was demonstrated at a constant force mode to verify the performance of the fabricated probe with the piezo strain gauge as a force sensor. SNDM experiments on a LiTaO₃ substrate were performed. Clear contrast of SNDM image was obtained using the diamond probe.

Original language	English
Title of host publication	TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers
Pages	1338-1341
Number of pages	4
DOIs	https://doi.org/10.1109/SENSOR.2005.1497328
Publication status	Published - 2005
Event	13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05 - Seoul, Korea, Republic of Duration: 2005 Jun 5 → 2005 Jun 9

Publication series

Name	Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05
Volume	2

Conference

Conference	13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05
Country/Territory	Korea, Republic of
City	Seoul
Period	05/6/5 → 05/6/9

Keywords

Data storage
Diamond
Ectrophoretic deposition process
Piezo strain gauge
Scanning nonlinear dielectric microscopy

Access to Document

10.1109/SENSOR.2005.1497328

Cite this

Takahashi, H., Onoe, A., Ono, T., Cho, Y., & Esashi, M. (2005). Diamond probe with silicon-based piezo strain gauge for high density data storage using scanning nonlinear dielectric microscopy. In TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers (pp. 1338-1341). Article 3E4.6 (Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05; Vol. 2). https://doi.org/10.1109/SENSOR.2005.1497328

Takahashi, Hirokazu ; Onoe, Atsushi ; Ono, Takahito et al. / Diamond probe with silicon-based piezo strain gauge for high density data storage using scanning nonlinear dielectric microscopy. TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers. 2005. pp. 1338-1341 (Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05).

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title = "Diamond probe with silicon-based piezo strain gauge for high density data storage using scanning nonlinear dielectric microscopy",

abstract = "This paper reports on the development of diamond probes integrated with a Si-based piezoresistive strain gauge for ultra-high-density ferroelectric data storage beyond 1 Tbit/inch2 with scanning nonlinear dielectric microscopy (SNDM). Only the tip of the probe was composed of diamond, and a cantilever integrated with the piezoresistive sensor was made of Si. The electrophoretic deposition process for diamond growth improved the production yield for sharp diamond tips. Topographic imaging using AFM was demonstrated at a constant force mode to verify the performance of the fabricated probe with the piezo strain gauge as a force sensor. SNDM experiments on a LiTaO3 substrate were performed. Clear contrast of SNDM image was obtained using the diamond probe.",

keywords = "Data storage, Diamond, Ectrophoretic deposition process, Piezo strain gauge, Scanning nonlinear dielectric microscopy",

author = "Hirokazu Takahashi and Atsushi Onoe and Takahito Ono and Yasuo Cho and Masayoshi Esashi",

year = "2005",

doi = "10.1109/SENSOR.2005.1497328",

language = "English",

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series = "Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05",

pages = "1338--1341",

booktitle = "TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers",

note = "13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05 ; Conference date: 05-06-2005 Through 09-06-2005",

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Takahashi, H, Onoe, A, Ono, T , Cho, Y & Esashi, M 2005, Diamond probe with silicon-based piezo strain gauge for high density data storage using scanning nonlinear dielectric microscopy. in TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers., 3E4.6, Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05, vol. 2, pp. 1338-1341, 13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05, Seoul, Korea, Republic of, 05/6/5. https://doi.org/10.1109/SENSOR.2005.1497328

Diamond probe with silicon-based piezo strain gauge for high density data storage using scanning nonlinear dielectric microscopy. / Takahashi, Hirokazu; Onoe, Atsushi; Ono, Takahito et al.
TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers. 2005. p. 1338-1341 3E4.6 (Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05; Vol. 2).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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T1 - Diamond probe with silicon-based piezo strain gauge for high density data storage using scanning nonlinear dielectric microscopy

AU - Takahashi, Hirokazu

AU - Onoe, Atsushi

AU - Ono, Takahito

AU - Cho, Yasuo

AU - Esashi, Masayoshi

PY - 2005

Y1 - 2005

N2 - This paper reports on the development of diamond probes integrated with a Si-based piezoresistive strain gauge for ultra-high-density ferroelectric data storage beyond 1 Tbit/inch2 with scanning nonlinear dielectric microscopy (SNDM). Only the tip of the probe was composed of diamond, and a cantilever integrated with the piezoresistive sensor was made of Si. The electrophoretic deposition process for diamond growth improved the production yield for sharp diamond tips. Topographic imaging using AFM was demonstrated at a constant force mode to verify the performance of the fabricated probe with the piezo strain gauge as a force sensor. SNDM experiments on a LiTaO3 substrate were performed. Clear contrast of SNDM image was obtained using the diamond probe.

AB - This paper reports on the development of diamond probes integrated with a Si-based piezoresistive strain gauge for ultra-high-density ferroelectric data storage beyond 1 Tbit/inch2 with scanning nonlinear dielectric microscopy (SNDM). Only the tip of the probe was composed of diamond, and a cantilever integrated with the piezoresistive sensor was made of Si. The electrophoretic deposition process for diamond growth improved the production yield for sharp diamond tips. Topographic imaging using AFM was demonstrated at a constant force mode to verify the performance of the fabricated probe with the piezo strain gauge as a force sensor. SNDM experiments on a LiTaO3 substrate were performed. Clear contrast of SNDM image was obtained using the diamond probe.

KW - Data storage

KW - Diamond

KW - Ectrophoretic deposition process

KW - Piezo strain gauge

KW - Scanning nonlinear dielectric microscopy

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BT - TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers

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Y2 - 5 June 2005 through 9 June 2005

ER -

Takahashi H, Onoe A, Ono T , Cho Y, Esashi M. Diamond probe with silicon-based piezo strain gauge for high density data storage using scanning nonlinear dielectric microscopy. In TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers. 2005. p. 1338-1341. 3E4.6. (Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05). doi: 10.1109/SENSOR.2005.1497328

Diamond probe with silicon-based piezo strain gauge for high density data storage using scanning nonlinear dielectric microscopy

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