Differential output type microflow sensor

Masayoshi Esashi, Hiroshi Kawai, Kenichi Yoshimi

Research output: Contribution to journalArticlepeer-review


To realize a flow sensor sensitive to a flow rate lower than 0.1 cc/min, a differential output‐type mass‐flow sensor with a pair of heaters was fabricated using the micromachining technique. In a conventional sensor with a single heater, sensitivity degradation occurs because of the natural convection around the heater. On the other hand, in the sensor in this study, the influence of the convection was eliminated by utilizing the differential outputs between the pair of heaters which were located closely together. As a result, the nonlinearity of the sensor was less than 2 percent even when the flow was lower than 0.1 cc/min.

Original languageEnglish
Pages (from-to)83-88
Number of pages6
JournalElectronics and Communications in Japan (Part II: Electronics)
Issue number8
Publication statusPublished - 1993 Jan 1


  • Micromachining
  • differential output
  • heater bridge
  • low flow rate
  • mass‐flow sensor

ASJC Scopus subject areas

  • Physics and Astronomy(all)
  • Computer Networks and Communications
  • Electrical and Electronic Engineering


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