TY - GEN
T1 - Direct measurement of the resolving power of X-ray CT system in SPring-8
AU - Uesugi, Kentaro
AU - Suzuki, Yoshio
AU - Takano, Hidekazu
AU - Tamura, Shigeharu
AU - Kamijo, Nagao
AU - Yagi, Naoto
PY - 2004/5/12
Y1 - 2004/5/12
N2 - Resolving power of high spatial resolution X-ray computed tomography (CT) system was evaluated by taking CT images of artificial test patterns at BL47XU in SPring-8 (SP-μCT BL47XU). The system consists of an in-vacuum type undulator, a double crystal monochromator cooled with liquid nitrogen, a high precision sample stages and a high spatial resolution X-ray detector. For the precise measurement of the resolving power, the artificial test patterns of Cu/Al concentric multilayer were fabricated by DC sputtering deposition at AIST Kansai. 7 or 5 layers of Cu/Al are deposited by period of 2 μm and 1 μm. Therefore the resolving power could be measured at 4 μm and 2 μm with each test pattern. It was confirmed that the system had a resolving power of 2 μm at 15keV from the CT images of test patterns. The resolution is not independent on the used energy. At 30keV, the resolving power was slightly poorer than 2 μm. The result was consistent with the point spread functions of the high resolution detector measured by focused micro-beam.
AB - Resolving power of high spatial resolution X-ray computed tomography (CT) system was evaluated by taking CT images of artificial test patterns at BL47XU in SPring-8 (SP-μCT BL47XU). The system consists of an in-vacuum type undulator, a double crystal monochromator cooled with liquid nitrogen, a high precision sample stages and a high spatial resolution X-ray detector. For the precise measurement of the resolving power, the artificial test patterns of Cu/Al concentric multilayer were fabricated by DC sputtering deposition at AIST Kansai. 7 or 5 layers of Cu/Al are deposited by period of 2 μm and 1 μm. Therefore the resolving power could be measured at 4 μm and 2 μm with each test pattern. It was confirmed that the system had a resolving power of 2 μm at 15keV from the CT images of test patterns. The resolution is not independent on the used energy. At 30keV, the resolving power was slightly poorer than 2 μm. The result was consistent with the point spread functions of the high resolution detector measured by focused micro-beam.
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U2 - 10.1063/1.1758043
DO - 10.1063/1.1758043
M3 - Conference contribution
AN - SCOPUS:85012302413
T3 - AIP Conference Proceedings
SP - 1316
EP - 1319
BT - Synchrotron Radiation Instrumentation
PB - American Institute of Physics Inc.
T2 - 8th International Conference on Synchrotron Radiation Instrumentation
Y2 - 25 August 2003 through 29 August 2003
ER -