TY - JOUR
T1 - Direct micropatterning of high dielectric BaTiO 3 films by laser-induced pyrolysis with a nano-crystalline seeding technique
AU - Kobayashi, Yoshio
AU - Miyajima, Kenshi
AU - Nagao, Daisuke
AU - Watanabe, Akira
AU - Yamada, Shinji
AU - Miwa, Takao
AU - Konno, Mikio
N1 - Funding Information:
This research was partially supported by the Ministry of Education, Culture, Sports, Science and Technology, a Grant-in-Aid for the COE project, Giant Molecules and Complex Systems.
PY - 2007/4/15
Y1 - 2007/4/15
N2 - A direct patterning method of dielectric BaTiO 3 (BT) films is proposed, which applies laser-induced pyrolysis in combination with nano-crystalline seeding technique. A precursor solution of a BT complex alkoxide containing BT nano-crystalline particles with polyvinylpyrollidone (PVP) as dispersion stabilizer was spin-coated on Pt substrate. An Ar + laser beam was focused and scanned on spin-coated BT films, which induced pyrolysis and crystallization of the films with spatial selectivity. Micropatterns were obtained by striping laser-unirradiated regions on the films with HCl aqueous solution. Raman spectra of the micropattern confirmed that the structures were tetragonal crystalline BT. Clear micropatterns with a line width of ca. 3 μm and an interval of 5 μm were formed at PVP concentrations of 25 and 50 kg/m 3 . The dielectric constant and dissipation factor of the film fabricated at a laser energy density of 27 MW/cm 2 and a scanning speed of 25 μm/s attained 76.2 and 0.07, respectively, for a measurement frequency of 100 kHz.
AB - A direct patterning method of dielectric BaTiO 3 (BT) films is proposed, which applies laser-induced pyrolysis in combination with nano-crystalline seeding technique. A precursor solution of a BT complex alkoxide containing BT nano-crystalline particles with polyvinylpyrollidone (PVP) as dispersion stabilizer was spin-coated on Pt substrate. An Ar + laser beam was focused and scanned on spin-coated BT films, which induced pyrolysis and crystallization of the films with spatial selectivity. Micropatterns were obtained by striping laser-unirradiated regions on the films with HCl aqueous solution. Raman spectra of the micropattern confirmed that the structures were tetragonal crystalline BT. Clear micropatterns with a line width of ca. 3 μm and an interval of 5 μm were formed at PVP concentrations of 25 and 50 kg/m 3 . The dielectric constant and dissipation factor of the film fabricated at a laser energy density of 27 MW/cm 2 and a scanning speed of 25 μm/s attained 76.2 and 0.07, respectively, for a measurement frequency of 100 kHz.
KW - BaTiO
KW - Crystallization
KW - Dielectric properties
KW - Laser-induced pyrolysis
KW - Micropattern
KW - Raman spectroscopy
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U2 - 10.1016/j.apsusc.2006.12.015
DO - 10.1016/j.apsusc.2006.12.015
M3 - Article
AN - SCOPUS:33847650890
SN - 0169-4332
VL - 253
SP - 5293
EP - 5301
JO - Applied Surface Science
JF - Applied Surface Science
IS - 12
ER -