Discharge of viscous UV-curable resin droplets by screen printing for UV nanoimprint lithography

Akira Tanabe, Takuya Uehara, Kazuro Nagase, Hiroaki Ikedo, Nobuya Hiroshiba, Takahiro Nakamura, Masaru Nakagawa

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14 Citations (Scopus)


We demonstrated a coating method of screen printing for discharging droplets of a high-viscosity resin on a substrate for ultraviolet (UV) nanoimprint lithography (NIL). Compared with a spin-coated resin film on a silicon substrate, discharged resin droplets on a silicon substrate were effective in terms of the uniformity of residual layer thickness (RLT) in contact with a mold with various pattern densities. Fluorescence microscope observations with a fluorescent-dye-containing UV-curable resin enabled the evaluation of the shapes of resin droplets discharged on a substrate surface. Widely used screen mesh plates composed of a stainless mesh covered with a patterned emulsion film caused defects of undischarged parts, whereas defects-free resin droplets with a narrow size distribution were discharged by mesh-free plates prepared with laser ablation. The pitch-to-diameter ratio in the configuration of 10-m-diameter holes needs to be larger than 2.5 times for printing a resin having a viscosity of 12,800mPas.

Original languageEnglish
Article number06GM01
JournalJapanese Journal of Applied Physics
Issue number6
Publication statusPublished - 2016 Jun


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