TY - JOUR
T1 - Dispersion-compensation electron-energy-loss spectrometer
AU - Okuyama, Hiroshi
AU - Shimonaka, Shuji
AU - Yasui, Yoshimi
AU - Takaoka, Tsuyoshi
AU - Nishijima, Mitsuaki
AU - Taguchi, Yukihiro
PY - 1998/11
Y1 - 1998/11
N2 - A dispersion-compensation electron-energy-loss spectrometer which consists of two 90° spherical sectors has been constructed and its characteristics have been tested. We have obtained the detector current of 160 pA with the full-width at half maximum of 25 meV for the primary electron energy of 19.5 eV in the direct mode, where electrons passing through the monochromator are directly detected by the analyzer without reflection from a sample. The obtained characteristics have been discussed, and suggestions for the design of an advanced spectrometer have been given.
AB - A dispersion-compensation electron-energy-loss spectrometer which consists of two 90° spherical sectors has been constructed and its characteristics have been tested. We have obtained the detector current of 160 pA with the full-width at half maximum of 25 meV for the primary electron energy of 19.5 eV in the direct mode, where electrons passing through the monochromator are directly detected by the analyzer without reflection from a sample. The obtained characteristics have been discussed, and suggestions for the design of an advanced spectrometer have been given.
KW - Dispersion compensation
KW - Electron energy loss spectroscopy
KW - Electron spectrometer
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U2 - 10.1143/jjap.37.6248
DO - 10.1143/jjap.37.6248
M3 - Article
AN - SCOPUS:0032206562
SN - 0021-4922
VL - 37
SP - 6248
EP - 6252
JO - Japanese Journal of Applied Physics
JF - Japanese Journal of Applied Physics
IS - 11
ER -