Abstract
We describe a displacement-amplified dynamic varifocal mirror using mechanical resonance. An electrostatically actuated varifocal mirror was fabricated from single crystalline silicon. The diameter and thickness of the mirror were 1 mm and 2 μm, respectively. The estimated ratio of the dynamic to the static displacement was about 50 in the vacuum range from 2 Pa to 50 Pa at the resonance. The laser beam focusing was also demonstrated using the varifocal mirror under the resonance operation.
| Original language | English |
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| Title of host publication | Optical MEMS and Nanophotonics 2013, OMN 2013 - Proceedings |
| Pages | 161-162 |
| Number of pages | 2 |
| DOIs | |
| Publication status | Published - 2013 Dec 1 |
| Event | 2013 International Conference on Optical MEMS and Nanophotonics, OMN 2013 - Kanazawa, Japan Duration: 2013 Aug 18 → 2013 Aug 22 |
Other
| Other | 2013 International Conference on Optical MEMS and Nanophotonics, OMN 2013 |
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| Country/Territory | Japan |
| City | Kanazawa |
| Period | 13/8/18 → 13/8/22 |
ASJC Scopus subject areas
- Hardware and Architecture
- Electrical and Electronic Engineering
- Electronic, Optical and Magnetic Materials