Displacement Measurement Using Grating Imaging Under Incoherent Illumination

Kazuhiro Hane, Takashi Itoh, Shuzo Hattori

Research output: Contribution to journalArticlepeer-review


The interference phenomenon known as grating imaging is studied from the viewpoint of displacement measurement. For the transmission and reflection arrangements of the gratings, the characteristics of the fringes, which are obtained at the infinite image plane under incoherent illumination, are examined quantitatively by the calculations based on the incoherent superposition of multi-diffraction patterns of the grating. Advantageously using the fringe obtained in the transmission optical arrangement, the grating separation and the lateral displacement have been measured simultaneously by a CCD camera. Furthermore, using 25 μm gratings and an alignment system with piezoelectric actuators, the preliminary experiment for precise alignment technique has been performed.

Original languageEnglish
Pages (from-to)2487-2490
Number of pages4
JournalNihon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C
Issue number506
Publication statusPublished - 1988


  • CCD Camera
  • Displacement Measurement
  • Grating
  • Precise Alignment


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