Displacement Measurement Using Grating Imaging Under Incoherent Illumination

Kazuhiro Hane; Takashi Itoh; Shuzo Hattori

doi:10.1299/kikaic.54.2487

Displacement Measurement Using Grating Imaging Under Incoherent Illumination

Kazuhiro Hane, Takashi Itoh, Shuzo Hattori

New Industry Creation Hatchery Center (NICHe)

Research output: Contribution to journal › Article › peer-review

Abstract

The interference phenomenon known as grating imaging is studied from the viewpoint of displacement measurement. For the transmission and reflection arrangements of the gratings, the characteristics of the fringes, which are obtained at the infinite image plane under incoherent illumination, are examined quantitatively by the calculations based on the incoherent superposition of multi-diffraction patterns of the grating. Advantageously using the fringe obtained in the transmission optical arrangement, the grating separation and the lateral displacement have been measured simultaneously by a CCD camera. Furthermore, using 25 μm gratings and an alignment system with piezoelectric actuators, the preliminary experiment for precise alignment technique has been performed.

Original language	English
Pages (from-to)	2487-2490
Number of pages	4
Journal	Nihon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C
Volume	54
Issue number	506
DOIs	https://doi.org/10.1299/kikaic.54.2487
Publication status	Published - 1988

Keywords

CCD Camera
Displacement Measurement
Grating
Precise Alignment

Access to Document

10.1299/kikaic.54.2487

Cite this

@article{08eee8db7f544176bb1c9f49bea928e2,

title = "Displacement Measurement Using Grating Imaging Under Incoherent Illumination",

abstract = "The interference phenomenon known as grating imaging is studied from the viewpoint of displacement measurement. For the transmission and reflection arrangements of the gratings, the characteristics of the fringes, which are obtained at the infinite image plane under incoherent illumination, are examined quantitatively by the calculations based on the incoherent superposition of multi-diffraction patterns of the grating. Advantageously using the fringe obtained in the transmission optical arrangement, the grating separation and the lateral displacement have been measured simultaneously by a CCD camera. Furthermore, using 25 μm gratings and an alignment system with piezoelectric actuators, the preliminary experiment for precise alignment technique has been performed.",

keywords = "CCD Camera, Displacement Measurement, Grating, Precise Alignment",

author = "Kazuhiro Hane and Takashi Itoh and Shuzo Hattori",

year = "1988",

doi = "10.1299/kikaic.54.2487",

language = "English",

volume = "54",

pages = "2487--2490",

journal = "Nihon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C",

issn = "0387-5024",

publisher = "Japan Society of Mechanical Engineers",

number = "506",

}

TY - JOUR

T1 - Displacement Measurement Using Grating Imaging Under Incoherent Illumination

AU - Hane, Kazuhiro

AU - Itoh, Takashi

AU - Hattori, Shuzo

PY - 1988

Y1 - 1988

N2 - The interference phenomenon known as grating imaging is studied from the viewpoint of displacement measurement. For the transmission and reflection arrangements of the gratings, the characteristics of the fringes, which are obtained at the infinite image plane under incoherent illumination, are examined quantitatively by the calculations based on the incoherent superposition of multi-diffraction patterns of the grating. Advantageously using the fringe obtained in the transmission optical arrangement, the grating separation and the lateral displacement have been measured simultaneously by a CCD camera. Furthermore, using 25 μm gratings and an alignment system with piezoelectric actuators, the preliminary experiment for precise alignment technique has been performed.

AB - The interference phenomenon known as grating imaging is studied from the viewpoint of displacement measurement. For the transmission and reflection arrangements of the gratings, the characteristics of the fringes, which are obtained at the infinite image plane under incoherent illumination, are examined quantitatively by the calculations based on the incoherent superposition of multi-diffraction patterns of the grating. Advantageously using the fringe obtained in the transmission optical arrangement, the grating separation and the lateral displacement have been measured simultaneously by a CCD camera. Furthermore, using 25 μm gratings and an alignment system with piezoelectric actuators, the preliminary experiment for precise alignment technique has been performed.

KW - CCD Camera

KW - Displacement Measurement

KW - Grating

KW - Precise Alignment

UR - http://www.scopus.com/inward/record.url?scp=0024092350&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0024092350&partnerID=8YFLogxK

U2 - 10.1299/kikaic.54.2487

DO - 10.1299/kikaic.54.2487

M3 - Article

AN - SCOPUS:0024092350

SN - 0387-5024

VL - 54

SP - 2487

EP - 2490

JO - Nihon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C

JF - Nihon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C

IS - 506

ER -

Displacement Measurement Using Grating Imaging Under Incoherent Illumination

Abstract

Keywords

Access to Document

Other files and links

Fingerprint

Cite this