TY - GEN
T1 - Driving of micromirror and simultaneous detection of rotation angle using integrated piezoresistive sensor
AU - Sasaki, Minoru
AU - Tabata, Motoki
AU - Hane, Kazuhiro
PY - 2007
Y1 - 2007
N2 - A piezoresistive rotation angle sensor is integrated in a micromirror driven by the electrostatic vertical comb drive actuator. The sensor signal is the voltage generated by the shear piezoresistance effect. Driving the electrostatic actuator, the sensor signal is measured. The sensor signal is confirmed to be proportional to the mirror rotation angle. The hysteresis of the sensor signal is found to be less than that observed under the open-control of the micromirror.
AB - A piezoresistive rotation angle sensor is integrated in a micromirror driven by the electrostatic vertical comb drive actuator. The sensor signal is the voltage generated by the shear piezoresistance effect. Driving the electrostatic actuator, the sensor signal is measured. The sensor signal is confirmed to be proportional to the mirror rotation angle. The hysteresis of the sensor signal is found to be less than that observed under the open-control of the micromirror.
KW - Integration
KW - Micromirror
KW - Piezoresistive Sensor
UR - http://www.scopus.com/inward/record.url?scp=50049090823&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=50049090823&partnerID=8YFLogxK
U2 - 10.1109/SENSOR.2007.4300592
DO - 10.1109/SENSOR.2007.4300592
M3 - Conference contribution
AN - SCOPUS:50049090823
SN - 1424408423
SN - 9781424408429
T3 - TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems
SP - 2151
EP - 2154
BT - TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems
T2 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07
Y2 - 10 June 2007 through 14 June 2007
ER -