@inproceedings{98689118d272484d9dd3b50889d505ee,
title = "Effect of Ar-N2 sputtering gas on structure and TMD effect in Co-(Si-N) nanogranular films",
abstract = "We have investigated the effect of N2 ratio in Ar-N2 sputtering gas on tunneling magneto-dielectric (TMD) effect in Co19-(Si-N)81 nanogranular films. Co19-(Si-N)81 films were deposited by co-sputtering Co and Si3N4 targets in Ar-x vol.%N2 mixture gas with different x of 0 to 30. All deposited films have nanogranular structure composed of Co nanogranules with a diameter of 2 ∼ 3 nm embedded in Si -N matrix, and we realized TMD effect in the film for x ≥ 3.3. The film deposited in Ar-6.6 vol.%N2 gas showed the highest TMD response. Moreover, we found the two types of change in both nanostructure and the frequency dependence of TMD effect. This study provides the new way to tailor the frequency response of TMD effect.",
keywords = "Tunneling magneto-dielectric effect, nanogranular film, silicon nitride, sputtering method",
author = "T. Uchiyama and Y. Cao and H. Kijima-Aoki and K. Ikeda and N. Kobayashi and S. Ohnuma and H. Masumoto",
note = "Publisher Copyright: {\textcopyright} 2023 IEEE.; 2023 IEEE International Magnetic Conference - Short Papers, INTERMAG Short Papers 2023 ; Conference date: 15-05-2023 Through 19-05-2023",
year = "2023",
doi = "10.1109/INTERMAGShortPapers58606.2023.10228457",
language = "English",
series = "2023 IEEE International Magnetic Conference - Short Papers, INTERMAG Short Papers 2023 - Proceedings",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "2023 IEEE International Magnetic Conference - Short Papers, INTERMAG Short Papers 2023 - Proceedings",
address = "United States",
}