TY - JOUR
T1 - Effect of configuration on microdischarge structure in a narrow channel
AU - Tong, Lizhu
AU - Yonemura, Shigeru
AU - Takana, Hidemasa
AU - Nishiyama, Hideya
PY - 2007/11/5
Y1 - 2007/11/5
N2 - The effect of channel diameter on SiH4 microdischarge in a narrow channel is studied by performing the Particle-in-Cell/Monte Carlo (PIC/MC) simulation. It is shown that the inner surface of the channel, on which electric charges are accumulated, plays a role of virtual electrode. A sheath is formed on the inner surface of the channel. The plasma density increases when the channel diameter is decreased. The minimum value of the applied voltages required to sustain the stable glow discharges decreases with decreasing channel diameter. The reason of these effects is clearly explained.
AB - The effect of channel diameter on SiH4 microdischarge in a narrow channel is studied by performing the Particle-in-Cell/Monte Carlo (PIC/MC) simulation. It is shown that the inner surface of the channel, on which electric charges are accumulated, plays a role of virtual electrode. A sheath is formed on the inner surface of the channel. The plasma density increases when the channel diameter is decreased. The minimum value of the applied voltages required to sustain the stable glow discharges decreases with decreasing channel diameter. The reason of these effects is clearly explained.
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U2 - 10.1016/j.physleta.2007.06.014
DO - 10.1016/j.physleta.2007.06.014
M3 - Article
AN - SCOPUS:35348959899
SN - 0375-9601
VL - 371
SP - 140
EP - 144
JO - Physics Letters, Section A: General, Atomic and Solid State Physics
JF - Physics Letters, Section A: General, Atomic and Solid State Physics
IS - 1-2
ER -