The effect of channel diameter on SiH4 microdischarge in a narrow channel is studied by performing the Particle-in-Cell/Monte Carlo (PIC/MC) simulation. It is shown that the inner surface of the channel, on which electric charges are accumulated, plays a role of virtual electrode. A sheath is formed on the inner surface of the channel. The plasma density increases when the channel diameter is decreased. The minimum value of the applied voltages required to sustain the stable glow discharges decreases with decreasing channel diameter. The reason of these effects is clearly explained.
|Number of pages||5|
|Journal||Physics Letters, Section A: General, Atomic and Solid State Physics|
|Publication status||Published - 2007 Nov 5|