TY - GEN
T1 - Effect of deposition rate on microstructure and thermal conductivity of YSZ films prepared by MOCVD
AU - Tu, Rong
AU - Goto, Takashi
PY - 2010/1/1
Y1 - 2010/1/1
N2 - Yttria stabilized zirconia (YSZ) films were prepared by a vertical cold-wall type CVD apparatus using Zr(dpm)4 and Y(dpm)3 as source precursors and the correlation among deposition rate, microstructure and thermal conductivity were investigated. The deposition rate (Rdep) of YSZ films was controlled in between 2 and 108 μm h-1 by changing total pressure in reactor (Ptot), deposition temperature (Tdep) and precursor concentration (Czr)- The microstructure of YSZ films changed from dense to columnar with increasing Rdep. The YSZ films prepared at a deposition rate higher than 50 μm h-1 at 1073 K had a columnar structure and each column was consisted of polycrystals. Two kinds of nano-pores around 100 and 10 nm were observed at the grain boundaries and within grains, respectively. The thermal conductivity (κ) of YSZ films decreased with increasing deposition rate (Rdep) and then kept at a constant of 0.8 W m-1 K -1 over Rdep = 40 μm h-1 which is about 1/3 of YSZ bulk.
AB - Yttria stabilized zirconia (YSZ) films were prepared by a vertical cold-wall type CVD apparatus using Zr(dpm)4 and Y(dpm)3 as source precursors and the correlation among deposition rate, microstructure and thermal conductivity were investigated. The deposition rate (Rdep) of YSZ films was controlled in between 2 and 108 μm h-1 by changing total pressure in reactor (Ptot), deposition temperature (Tdep) and precursor concentration (Czr)- The microstructure of YSZ films changed from dense to columnar with increasing Rdep. The YSZ films prepared at a deposition rate higher than 50 μm h-1 at 1073 K had a columnar structure and each column was consisted of polycrystals. Two kinds of nano-pores around 100 and 10 nm were observed at the grain boundaries and within grains, respectively. The thermal conductivity (κ) of YSZ films decreased with increasing deposition rate (Rdep) and then kept at a constant of 0.8 W m-1 K -1 over Rdep = 40 μm h-1 which is about 1/3 of YSZ bulk.
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U2 - 10.1002/9780470640845.ch55
DO - 10.1002/9780470640845.ch55
M3 - Conference contribution
AN - SCOPUS:77952362618
SN - 9780470408421
T3 - Ceramic Transactions
SP - 387
EP - 393
BT - Ceramic Materials and Components for Energy and Environmental Applications - 9th Int. Symp. on Ceramic Materials for Energy and Environmental Applications and the 4th Laser Ceramics Symp.
PB - American Ceramic Society
T2 - Ceramic Materials and Components for Energy and Environmental Applications - 9th International Symposium on Ceramic Materials for Energy and Environmental Applications and the 4th Laser Ceramics Symposium
Y2 - 10 November 2008 through 14 November 2008
ER -