Effect of deposition temperature on chemical structure of lanthanum oxide/Si interface structure

H. Nohira, T. Matsuda, K. Tachi, Y. Shiino, J. Song, Y. Kuroki, Jin Aun Ng, P. Ahmet, K. Kakushima, K. Tsutsui, E. Ikenaga, K. Kobayashi, H. Iwai, T. Hattori

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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