Effect of electrical charging on scanning electron microscopy-energy dispersive X-ray spectroscopy analysis of insulating materials

We investigated the conditions under which we can obtain reasonable qualitative results in scanning electron microscopy-energy dispersive X-ray spectroscopy (SEM-EDX) analysis of trace elements in insulating materials using a diluted ionic liquid (EMI-CH₃COO) and changing probe current. Below 100 nA, electrical charging of insulating materials was prevented. The probe current of 10 nA was suitable for qualitative analysis because the intensities of peaks from these materials were strong enough to detect trace elements at the concentration of 0.1 wt.% in the sample without interference by sum peaks. Diluted EMI-CH₃COO can also be used for SEM-EDX quantitative analysis of insulating materials as discharging agents. In contrast, when insulating materials were electrically charged, the obtained spectra contained characteristic X-rays of the insulating materials with low energies and of materials other than the samples such as the sample stage and the collimator in the X-ray detector. This is because electrons from the electron beam were decelerated by and deflected from the insulating materials. By coating the insulating materials with the diluted EMI-CH₃COO, the deceleration and deflection of the electron beam were prevented.