TY - JOUR
T1 - Effect of nitrogen content on the microstructure and mechanical properties of Ti-Mo-N coating films
AU - Komiyama, Shoko
AU - Sutou, Yuji
AU - Koike, Junichi
N1 - Funding Information:
This work was supported in part by the Osawa Scientific Studies Grants Foundation.
PY - 2011/11
Y1 - 2011/11
N2 - Effects of nitrogen content on the microstructure, hardness, and friction coefficient of Ti-Mo-N coating films were investigated. Ti-Mo-N films were deposited onto an AISI304 stainless steel substrate by reactive r.f. sputtering in the mixture of argon and nitrogen gases with various gas flow rates. The hardness and friction coefficients were measured by nanoindentation and ball-on-disk testing systems, respectively. The hardness of the Ti-Mo-N films increased with increasing a nitrogen gas flow rate (fN2) and showed a maximum hardness of about 30 GPa at a fN2 = 0:3 ccm. On the one hand, the films deposited at fN2 ≤ 1:0 ccm showed a constant hardness value of approximately 25 GPa. On the other hand, the friction coefficient of the Ti-Mo-N film decreased with increasing N content and was 0.44 in the film deposited at fN2 = 2:0 ccm.
AB - Effects of nitrogen content on the microstructure, hardness, and friction coefficient of Ti-Mo-N coating films were investigated. Ti-Mo-N films were deposited onto an AISI304 stainless steel substrate by reactive r.f. sputtering in the mixture of argon and nitrogen gases with various gas flow rates. The hardness and friction coefficients were measured by nanoindentation and ball-on-disk testing systems, respectively. The hardness of the Ti-Mo-N films increased with increasing a nitrogen gas flow rate (fN2) and showed a maximum hardness of about 30 GPa at a fN2 = 0:3 ccm. On the one hand, the films deposited at fN2 ≤ 1:0 ccm showed a constant hardness value of approximately 25 GPa. On the other hand, the friction coefficient of the Ti-Mo-N film decreased with increasing N content and was 0.44 in the film deposited at fN2 = 2:0 ccm.
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U2 - 10.1007/s11661-010-0522-x
DO - 10.1007/s11661-010-0522-x
M3 - Article
AN - SCOPUS:80053565611
SN - 1073-5623
VL - 42
SP - 3310
EP - 3315
JO - Metallurgical and Materials Transactions A: Physical Metallurgy and Materials Science
JF - Metallurgical and Materials Transactions A: Physical Metallurgy and Materials Science
IS - 11
ER -