Effect of SR irradiation on in2O3 film

K. Hanamoto; A. Hirai; M. Sasaki; Yuki Kimura; K. Miyatani; C. Kaito; Y. Nakayama

doi:10.1016/S0168-9002(01)00618-0

Effect of SR irradiation on in₂O₃ film

K. Hanamoto, A. Hirai, M. Sasaki, Yuki Kimura, K. Miyatani, C. Kaito, Y. Nakayama

SCI - Earth Science

Research output: Contribution to journal › Article › peer-review

2 Citations (Scopus)

Abstract

The effect of SR irradiation on the crystal growth of indium oxide films prepared by electron-beam evaporation have been studied by X-ray diffraction and high-resolution electron microscopy. An as-deposited film showed In₂O₃ crystallites with a size of 2-10 nm. The crystallites were destroyed by SR irradiation under oxygen flow. SR irradiation without oxygen flow showed the growth of In₂O₃ crystallites up to 20 nm in size with accompanying deoxidation and indium-particle growth. The as-deposited film was composed of variously oriented particles. Periodic oxygen decomposition of the film preferentially took place on the (001)-oriented particle.

Original language	English
Pages (from-to)	1213-1216
Number of pages	4
Journal	Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
Volume	467-468
Issue number	PART II
DOIs	https://doi.org/10.1016/S0168-9002(01)00618-0
Publication status	Published - 2001 Dec 1

Keywords

Crystallization
High-resolution electron microscopy
InO
Irradiation
Thin film

ASJC Scopus subject areas

Nuclear and High Energy Physics
Instrumentation

Access to Document

10.1016/S0168-9002(01)00618-0

Cite this

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title = "Effect of SR irradiation on in2O3 film",

abstract = "The effect of SR irradiation on the crystal growth of indium oxide films prepared by electron-beam evaporation have been studied by X-ray diffraction and high-resolution electron microscopy. An as-deposited film showed In2O3 crystallites with a size of 2-10 nm. The crystallites were destroyed by SR irradiation under oxygen flow. SR irradiation without oxygen flow showed the growth of In2O3 crystallites up to 20 nm in size with accompanying deoxidation and indium-particle growth. The as-deposited film was composed of variously oriented particles. Periodic oxygen decomposition of the film preferentially took place on the (001)-oriented particle.",

keywords = "Crystallization, High-resolution electron microscopy, InO, Irradiation, Thin film",

author = "K. Hanamoto and A. Hirai and M. Sasaki and Yuki Kimura and K. Miyatani and C. Kaito and Y. Nakayama",

year = "2001",

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TY - JOUR

T1 - Effect of SR irradiation on in2O3 film

AU - Hanamoto, K.

AU - Hirai, A.

AU - Sasaki, M.

AU - Kimura, Yuki

AU - Miyatani, K.

AU - Kaito, C.

AU - Nakayama, Y.

PY - 2001/12/1

Y1 - 2001/12/1

N2 - The effect of SR irradiation on the crystal growth of indium oxide films prepared by electron-beam evaporation have been studied by X-ray diffraction and high-resolution electron microscopy. An as-deposited film showed In2O3 crystallites with a size of 2-10 nm. The crystallites were destroyed by SR irradiation under oxygen flow. SR irradiation without oxygen flow showed the growth of In2O3 crystallites up to 20 nm in size with accompanying deoxidation and indium-particle growth. The as-deposited film was composed of variously oriented particles. Periodic oxygen decomposition of the film preferentially took place on the (001)-oriented particle.

AB - The effect of SR irradiation on the crystal growth of indium oxide films prepared by electron-beam evaporation have been studied by X-ray diffraction and high-resolution electron microscopy. An as-deposited film showed In2O3 crystallites with a size of 2-10 nm. The crystallites were destroyed by SR irradiation under oxygen flow. SR irradiation without oxygen flow showed the growth of In2O3 crystallites up to 20 nm in size with accompanying deoxidation and indium-particle growth. The as-deposited film was composed of variously oriented particles. Periodic oxygen decomposition of the film preferentially took place on the (001)-oriented particle.

KW - Crystallization

KW - High-resolution electron microscopy

KW - InO

KW - Irradiation

KW - Thin film

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JF - Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

IS - PART II

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