TY - GEN
T1 - Effect of thickness ratio of double layered thickness-shear resonator on temperature characteristics of resonance frequency
AU - Owada, Yusuke
AU - Ohashi, Yuji
AU - Omote, Masaya
AU - Yokota, Yuui
AU - Kurosawa, Shunsuke
AU - Kamada, Kei
AU - Sato, Hiroki
AU - Toyoda, Satoshi
AU - Yamaji, Akihiro
AU - Yoshino, Masao
AU - Hanada, Takashi
AU - Yoshikawa, Akira
N1 - Publisher Copyright:
© 2020 IEEE.
PY - 2020/9/7
Y1 - 2020/9/7
N2 - The factor dictating the temperature characteristic of the double layered thickness-shear resonator was investigated by evaluating the resonators with different thickness ratios. Using Ca3TaGa3Si2O14[CTGS], one of the Langasite-type piezoelectric single crystal, double layered resonators with thickness ratios x = 0.25 and 0.5 were fabricated and the temperature dependence of their resonance frequency were measured at -30 to 80°C. As a result, the temperature characteristics for the resonator with x = 0.25 exhibited different profiles depending on the order of resonance mode, on the other hand, those for the resonator with x = 0.5 exhibited no difference among all of the order. Comparing these results with the wave propagation model in the resonator, it was found that the thickness ratio of two layers at the region effectively contributing to the electric field output was deeply related to the deviation of the temperature characteristics.
AB - The factor dictating the temperature characteristic of the double layered thickness-shear resonator was investigated by evaluating the resonators with different thickness ratios. Using Ca3TaGa3Si2O14[CTGS], one of the Langasite-type piezoelectric single crystal, double layered resonators with thickness ratios x = 0.25 and 0.5 were fabricated and the temperature dependence of their resonance frequency were measured at -30 to 80°C. As a result, the temperature characteristics for the resonator with x = 0.25 exhibited different profiles depending on the order of resonance mode, on the other hand, those for the resonator with x = 0.5 exhibited no difference among all of the order. Comparing these results with the wave propagation model in the resonator, it was found that the thickness ratio of two layers at the region effectively contributing to the electric field output was deeply related to the deviation of the temperature characteristics.
KW - Direct bonding
KW - Langasite-type piezoelectric single crystal
KW - Temperature compensation
KW - Thickness-shear mode resonator
UR - http://www.scopus.com/inward/record.url?scp=85097883679&partnerID=8YFLogxK
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U2 - 10.1109/IUS46767.2020.9251706
DO - 10.1109/IUS46767.2020.9251706
M3 - Conference contribution
AN - SCOPUS:85097883679
T3 - IEEE International Ultrasonics Symposium, IUS
BT - IUS 2020 - International Ultrasonics Symposium, Proceedings
PB - IEEE Computer Society
T2 - 2020 IEEE International Ultrasonics Symposium, IUS 2020
Y2 - 7 September 2020 through 11 September 2020
ER -