Abstract
Intentionally undoped p -type Β -FeSi2 thin films were grown on Si(111) substrates by molecular-beam epitaxy using low-purity (4N) and high-purity (5N) Fe sources to investigate the effect of using a high-purity Fe source on the electrical properties of Β -FeSi2. The hole mobility increased and the hole density decreased greatly as the annealing temperature and time were increased, particularly for the Β -FeSi2 films produced using 5N-Fe. The observed temperature dependence of the hole mobility was reproduced well by considering various carrier scattering mechanisms due to acoustic-phonon, polar-optical phonon, nonpolar-optical phonon, and ionized impurities.
Original language | English |
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Article number | 103706 |
Journal | Journal of Applied Physics |
Volume | 102 |
Issue number | 10 |
DOIs | |
Publication status | Published - 2007 |