Effect of vanadium doping on amorphization of ZnO thin films on c-plane sapphire substrate

Akihiro Watanabe, Hiroshi Chiba, Tomoyuki Kawashima, Katsuyoshi Washio

Research output: Contribution to journalArticlepeer-review

5 Citations (Scopus)


The effect of vanadium (V) doping on amorphization of zinc oxide (ZnO) thin films deposited on c-plane sapphire substrate at room temperature by RF magnetron sputtering was investigated. From the in-plane X-ray diffraction measurements, the diffraction intensity from 30° rotated domains observed in the ZnO film weakened with increasing V concentration. Faint diffractions from both the 30° rotated and normal domains were seen in the V-doped ZnO (VZO) film of 1.7-at.% V, and relatively strong diffractions only from the normal domain were observed at 2.1-at.% V while the 30° rotated domains diminished. There were only weak normal domains for VZO over 2.4-at.% V. Concerning the c-axis orientation, the broad (0002) diffraction peaks were observed in all VZO films, and the peak was the widest for the 3.8-at.% VZO film. From the dependence of crystallinity on thickness for the highly-doped VZO (V: 3.8 at.%) films, the c-axis orientation deteriorated with increasing film thickness and no diffraction signal was seen for the VZO films over 35-nm thick. This means that the VZO film aligned by the c-plane sapphire grew only at the initial stage, but an accumulation of disordered layers worsened the crystallinity with thickening the film. From the above-mentioned results, even in the ZnO film in which the grains tend to align to the c-axis orientation preferentially, the doping of transition metals, like V in this study, plays an effective reaction to form the pseudo-amorphous thin film. It is considered that this phenomenon is attributed to the feature of transition metal in which the transition metal atoms can take a state of various valence or coordination numbers.

Original languageEnglish
Pages (from-to)73-76
Number of pages4
JournalThin Solid Films
Publication statusPublished - 2016 Apr 30


  • Amorphization
  • Buffer layer
  • RF magnetron sputtering
  • Vanadium
  • Zinc oxide

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry


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