Effects of buffer layer and substrate temperature on the surface morphology, the domain structure and magnetic properties of c-axis-oriented Nd 2Fe 14B films

S. L. Chen; W. Liu; C. L. Chen; Z. D. Zhang

doi:10.1063/1.1997295

Effects of buffer layer and substrate temperature on the surface morphology, the domain structure and magnetic properties of c-axis-oriented Nd ₂Fe ₁₄B films

S. L. Chen, W. Liu, C. L. Chen, Z. D. Zhang

Research output: Contribution to journal › Article › peer-review

22 Citations (Scopus)

Abstract

Anisotropic Nd-Fe-B thin films with c -axis texture are fabricated by dc magnetron sputtering on heated Si substrate. The influence of Ti or Mo buffer layer thickness and substrate temperature on the surface morphology, the domain structure and the magnetic properties are investigated and compared for the Nd-Fe-B films. It is found that the morphology of the surface strongly depends on the thickness of the buffer layer. A rough surface is observed if there is no buffer layer between the substrate and Nd-Fe-B layer or the buffer layer is too thick. Mo shows to be the better candidate for the buffer layer for its perfect lattice match with the Nd-Fe-B layer. The best values for the maximum energy products are 11.9 and 14.8 MGOe for the Nd-Fe-B films with Ti and Mo buffer layers, respectively.

Original language	English
Article number	033907
Journal	Journal of Applied Physics
Volume	98
Issue number	3
DOIs	https://doi.org/10.1063/1.1997295
Publication status	Published - 2005 Aug 1

ASJC Scopus subject areas

Physics and Astronomy(all)

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10.1063/1.1997295

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title = "Effects of buffer layer and substrate temperature on the surface morphology, the domain structure and magnetic properties of c-axis-oriented Nd 2Fe 14B films",

abstract = "Anisotropic Nd-Fe-B thin films with c -axis texture are fabricated by dc magnetron sputtering on heated Si substrate. The influence of Ti or Mo buffer layer thickness and substrate temperature on the surface morphology, the domain structure and the magnetic properties are investigated and compared for the Nd-Fe-B films. It is found that the morphology of the surface strongly depends on the thickness of the buffer layer. A rough surface is observed if there is no buffer layer between the substrate and Nd-Fe-B layer or the buffer layer is too thick. Mo shows to be the better candidate for the buffer layer for its perfect lattice match with the Nd-Fe-B layer. The best values for the maximum energy products are 11.9 and 14.8 MGOe for the Nd-Fe-B films with Ti and Mo buffer layers, respectively.",

author = "Chen, {S. L.} and W. Liu and Chen, {C. L.} and Zhang, {Z. D.}",

note = "Funding Information: This work has been supported by the National Nature Science Foundation of China under Project Nos. 50331030, and 50371085, and the National 863 project under Grant No. 2002AA302603.",

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AU - Chen, S. L.

AU - Liu, W.

AU - Chen, C. L.

AU - Zhang, Z. D.

N1 - Funding Information: This work has been supported by the National Nature Science Foundation of China under Project Nos. 50331030, and 50371085, and the National 863 project under Grant No. 2002AA302603.

PY - 2005/8/1

Y1 - 2005/8/1

N2 - Anisotropic Nd-Fe-B thin films with c -axis texture are fabricated by dc magnetron sputtering on heated Si substrate. The influence of Ti or Mo buffer layer thickness and substrate temperature on the surface morphology, the domain structure and the magnetic properties are investigated and compared for the Nd-Fe-B films. It is found that the morphology of the surface strongly depends on the thickness of the buffer layer. A rough surface is observed if there is no buffer layer between the substrate and Nd-Fe-B layer or the buffer layer is too thick. Mo shows to be the better candidate for the buffer layer for its perfect lattice match with the Nd-Fe-B layer. The best values for the maximum energy products are 11.9 and 14.8 MGOe for the Nd-Fe-B films with Ti and Mo buffer layers, respectively.

AB - Anisotropic Nd-Fe-B thin films with c -axis texture are fabricated by dc magnetron sputtering on heated Si substrate. The influence of Ti or Mo buffer layer thickness and substrate temperature on the surface morphology, the domain structure and the magnetic properties are investigated and compared for the Nd-Fe-B films. It is found that the morphology of the surface strongly depends on the thickness of the buffer layer. A rough surface is observed if there is no buffer layer between the substrate and Nd-Fe-B layer or the buffer layer is too thick. Mo shows to be the better candidate for the buffer layer for its perfect lattice match with the Nd-Fe-B layer. The best values for the maximum energy products are 11.9 and 14.8 MGOe for the Nd-Fe-B films with Ti and Mo buffer layers, respectively.

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Effects of buffer layer and substrate temperature on the surface morphology, the domain structure and magnetic properties of c-axis-oriented Nd ₂Fe ₁₄B films

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