Abstract
A spiral scanning atomic force microscope (AFM) system for large-area measurement was presented, which is composed of an air slide moving along the X-direction, an air spindle rotating around the Z-direction and a probe unit that it is designed for detecting microstructured surface profile. The spiral scanning is carried out by synchronizing the linear motions of the air slide in X-axis and the rotation of the air spindle around Z-axis. When the centering errors between the probe tip and the rotation center of the spindle occur, the measuring accuracy of the system will decrease and it can not truly image the micro-structured profile of the sample. The effects of centering error on measuring result were researched via simulation and experiment, and the reasons of the image distortion were also analyzed. Finally, based on this system, the experiment of high-speed and large-area measurement of the micro-structured profile on grating surface was performed. The results show that it just spends 4 minutes to measure the micro-structured surface where its diameter is 2.4 mm.
| Original language | English |
|---|---|
| Title of host publication | 2010 International Conference on Mechanic Automation and Control Engineering, MACE2010 |
| Pages | 3024-3027 |
| Number of pages | 4 |
| DOIs | |
| Publication status | Published - 2010 Sept 2 |
| Event | 2010 International Conference on Mechanic Automation and Control Engineering, MACE2010 - Wuhan, China Duration: 2010 Jun 26 → 2010 Jun 28 |
Other
| Other | 2010 International Conference on Mechanic Automation and Control Engineering, MACE2010 |
|---|---|
| Country/Territory | China |
| City | Wuhan |
| Period | 10/6/26 → 10/6/28 |
Keywords
- AFM
- Centering error
- Large-area measurement
- Spiral scanning
ASJC Scopus subject areas
- Control and Systems Engineering
- Mechanical Engineering