TY - JOUR
T1 - Effects of irradiation with ions and photons in ultraviolet-vacuum ultraviolet regions on nano-surface properties of polymers exposed to plasmas
AU - Cho, Ken
AU - Takenaka, Kosuke
AU - Setsuhara, Yuichi
AU - Shiratani, Masaharu
AU - Sekine, Makoto
AU - Hori, Masaru
PY - 2012/1
Y1 - 2012/1
N2 - The interactions of ions and photons in ultraviolet (UV) and vacuum ultraviolet (VUV) regions from argon plasmas with polymer surfaces were investigated by of depth analysis of chemical bonding states in the nano-surface layer of poly(ethylene terephthalate) (PET) films via conventional X-ray photoelectron spectroscopy (XPS) and hard X-ray photoelectron spectroscopy (HXPES). The PET films were exposed to argon plasmas by covering the PET films with MgF2 and quartz windows as optical filters to compare the irradiation effects with ions and photons. The conventional XPS results indicated that oxygen functionalities (the C-O bond and the O-C-O bond) were degraded by ion bombardment in the shallower region up to about 10 nm from the surface, whereas the effect of photoirradiation in the UV and VUV regions was insignificant. The HXPES analysis showed that irradiation with ions and photons did not cause serious damage in chemical bonding states in the deeper region up to about 50nm from the surface.
AB - The interactions of ions and photons in ultraviolet (UV) and vacuum ultraviolet (VUV) regions from argon plasmas with polymer surfaces were investigated by of depth analysis of chemical bonding states in the nano-surface layer of poly(ethylene terephthalate) (PET) films via conventional X-ray photoelectron spectroscopy (XPS) and hard X-ray photoelectron spectroscopy (HXPES). The PET films were exposed to argon plasmas by covering the PET films with MgF2 and quartz windows as optical filters to compare the irradiation effects with ions and photons. The conventional XPS results indicated that oxygen functionalities (the C-O bond and the O-C-O bond) were degraded by ion bombardment in the shallower region up to about 10 nm from the surface, whereas the effect of photoirradiation in the UV and VUV regions was insignificant. The HXPES analysis showed that irradiation with ions and photons did not cause serious damage in chemical bonding states in the deeper region up to about 50nm from the surface.
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U2 - 10.1143/JJAP.51.01AJ02
DO - 10.1143/JJAP.51.01AJ02
M3 - Article
AN - SCOPUS:84857211958
SN - 0021-4922
VL - 51
JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
IS - 1 PART 2
M1 - 01AJ02
ER -