Piezoelectric properties were evaluated for annealed BaTiO3 (BT) films formed by aerosol deposition on yttria-stabilized zirconia (YSZ) and Fe-Cr- Al-based heat-resistant stainless steel (SS). The piezoelectric constants d31 of BT films annealed at 1200 °C formed on YSZ and SS were %71 and %41pm/V, respectively. The effects of different substrates on piezoelectric properties were investigated. The grain sizes of the films formed on YSZ and SS were 1.5 and 1.0 μm, respectively. X-ray diffraction analysis using a two-dimensional stress method revealed that the respective residual stresses of the films formed on YSZ and SS were %55 + 8 and %32 + 7MPa, respectively, as compressive stresses. The c-domain structure was formed preferentially in the films on SS because of its larger compressive stress. These results suggest that differences in piezoelectric properties attributable to substrates result from differences in compressive stress magnitude and the volume fraction between the c-And a-domains.