TY - JOUR
T1 - Effects of substrate materials on piezoelectric properties of BaTiO3 thick films deposited by aerosol deposition
AU - Kawakami, Yoshihiro
AU - Watanabe, Masato
AU - Arai, Ken Ichi
AU - Sugimoto, Satoshi
N1 - Publisher Copyright:
© 2016 The Japan Society of Applied Physics.
PY - 2016/10
Y1 - 2016/10
N2 - Piezoelectric properties were evaluated for annealed BaTiO3 (BT) films formed by aerosol deposition on yttria-stabilized zirconia (YSZ) and Fe-Cr- Al-based heat-resistant stainless steel (SS). The piezoelectric constants d31 of BT films annealed at 1200 °C formed on YSZ and SS were %71 and %41pm/V, respectively. The effects of different substrates on piezoelectric properties were investigated. The grain sizes of the films formed on YSZ and SS were 1.5 and 1.0 μm, respectively. X-ray diffraction analysis using a two-dimensional stress method revealed that the respective residual stresses of the films formed on YSZ and SS were %55 + 8 and %32 + 7MPa, respectively, as compressive stresses. The c-domain structure was formed preferentially in the films on SS because of its larger compressive stress. These results suggest that differences in piezoelectric properties attributable to substrates result from differences in compressive stress magnitude and the volume fraction between the c-And a-domains.
AB - Piezoelectric properties were evaluated for annealed BaTiO3 (BT) films formed by aerosol deposition on yttria-stabilized zirconia (YSZ) and Fe-Cr- Al-based heat-resistant stainless steel (SS). The piezoelectric constants d31 of BT films annealed at 1200 °C formed on YSZ and SS were %71 and %41pm/V, respectively. The effects of different substrates on piezoelectric properties were investigated. The grain sizes of the films formed on YSZ and SS were 1.5 and 1.0 μm, respectively. X-ray diffraction analysis using a two-dimensional stress method revealed that the respective residual stresses of the films formed on YSZ and SS were %55 + 8 and %32 + 7MPa, respectively, as compressive stresses. The c-domain structure was formed preferentially in the films on SS because of its larger compressive stress. These results suggest that differences in piezoelectric properties attributable to substrates result from differences in compressive stress magnitude and the volume fraction between the c-And a-domains.
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U2 - 10.7567/JJAP.55.10TA10
DO - 10.7567/JJAP.55.10TA10
M3 - Article
AN - SCOPUS:84994235428
SN - 0021-4922
VL - 55
JO - Japanese Journal of Applied Physics
JF - Japanese Journal of Applied Physics
IS - 10
M1 - 10TA10
ER -