Efficient extreme ultraviolet emission from one-dimensional spherical plasmas produced by multiple lasers

Kensuke Yoshida; Shinsuke Fujioka; Takeshi Higashiguchi; Teruyuki Ugomori; Nozomi Tanaka; Hayato Ohashi; Masato Kawasaki; Yuhei Suzuki; Chihiro Suzuki; Kentaro Tomita; Ryoichi Hirose; Takeo Ejima; Masaharu Nishikino; Atsushi Sunahara; Enda Scally; Bowen Li; Tatsuya Yanagida; Hiroaki Nishimura; Hiroshi Azechi; Gerry O'Sullivan

doi:10.7567/APEX.7.086202

Efficient extreme ultraviolet emission from one-dimensional spherical plasmas produced by multiple lasers

Kensuke Yoshida, Shinsuke Fujioka, Takeshi Higashiguchi, Teruyuki Ugomori, Nozomi Tanaka, Hayato Ohashi, Masato Kawasaki, Yuhei Suzuki, Chihiro Suzuki, Kentaro Tomita, Ryoichi Hirose, Takeo Ejima, Masaharu Nishikino, Atsushi Sunahara, Enda Scally, Bowen Li, Tatsuya Yanagida, Hiroaki Nishimura, Hiroshi Azechi, Gerry O'Sullivan

SRIS - SR Core Research Division

Research output: Contribution to journal › Article › peer-review

29 Citations (Scopus)

Abstract

We demonstrate high conversion efficiency for extreme ultraviolet (EUV) emission at 6.5-6.7nm from multiple laser beam-produced onedimensional spherical plasmas. Multiply charged-state ions produce strong resonance emission lines, which combine to yield intense unresolved transition arrays (UTAs) in Gd, Tb, and Mo. At an optimum laser intensity of 1 × 10¹²W/cm ², which is estimated to yield an electron temperature of around 100 eV, the maximum in-band EUV conversion efficiency (CE) was observed to be 0.8%, which is one of the highest values ever reported due to the reduction of plasma expansion loss.

Original language	English
Article number	086202
Journal	Applied Physics Express
Volume	7
Issue number	8
DOIs	https://doi.org/10.7567/APEX.7.086202
Publication status	Published - 2014 Aug

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Yoshida, K., Fujioka, S., Higashiguchi, T., Ugomori, T., Tanaka, N., Ohashi, H., Kawasaki, M., Suzuki, Y., Suzuki, C., Tomita, K., Hirose, R., Ejima, T., Nishikino, M., Sunahara, A., Scally, E., Li, B., Yanagida, T., Nishimura, H., Azechi, H., & O'Sullivan, G. (2014). Efficient extreme ultraviolet emission from one-dimensional spherical plasmas produced by multiple lasers. Applied Physics Express, 7(8), Article 086202. https://doi.org/10.7567/APEX.7.086202

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title = "Efficient extreme ultraviolet emission from one-dimensional spherical plasmas produced by multiple lasers",

abstract = "We demonstrate high conversion efficiency for extreme ultraviolet (EUV) emission at 6.5-6.7nm from multiple laser beam-produced onedimensional spherical plasmas. Multiply charged-state ions produce strong resonance emission lines, which combine to yield intense unresolved transition arrays (UTAs) in Gd, Tb, and Mo. At an optimum laser intensity of 1 × 1012W/cm 2, which is estimated to yield an electron temperature of around 100 eV, the maximum in-band EUV conversion efficiency (CE) was observed to be 0.8%, which is one of the highest values ever reported due to the reduction of plasma expansion loss.",

author = "Kensuke Yoshida and Shinsuke Fujioka and Takeshi Higashiguchi and Teruyuki Ugomori and Nozomi Tanaka and Hayato Ohashi and Masato Kawasaki and Yuhei Suzuki and Chihiro Suzuki and Kentaro Tomita and Ryoichi Hirose and Takeo Ejima and Masaharu Nishikino and Atsushi Sunahara and Enda Scally and Bowen Li and Tatsuya Yanagida and Hiroaki Nishimura and Hiroshi Azechi and Gerry O'Sullivan",

year = "2014",

month = aug,

doi = "10.7567/APEX.7.086202",

language = "English",

volume = "7",

journal = "Applied Physics Express",

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Yoshida, K, Fujioka, S, Higashiguchi, T, Ugomori, T, Tanaka, N, Ohashi, H, Kawasaki, M, Suzuki, Y, Suzuki, C, Tomita, K, Hirose, R, Ejima, T, Nishikino, M, Sunahara, A, Scally, E, Li, B, Yanagida, T, Nishimura, H, Azechi, H & O'Sullivan, G 2014, 'Efficient extreme ultraviolet emission from one-dimensional spherical plasmas produced by multiple lasers', Applied Physics Express, vol. 7, no. 8, 086202. https://doi.org/10.7567/APEX.7.086202

TY - JOUR

T1 - Efficient extreme ultraviolet emission from one-dimensional spherical plasmas produced by multiple lasers

AU - Yoshida, Kensuke

AU - Fujioka, Shinsuke

AU - Higashiguchi, Takeshi

AU - Ugomori, Teruyuki

AU - Tanaka, Nozomi

AU - Ohashi, Hayato

AU - Kawasaki, Masato

AU - Suzuki, Yuhei

AU - Suzuki, Chihiro

AU - Tomita, Kentaro

AU - Hirose, Ryoichi

AU - Ejima, Takeo

AU - Nishikino, Masaharu

AU - Sunahara, Atsushi

AU - Scally, Enda

AU - Li, Bowen

AU - Yanagida, Tatsuya

AU - Nishimura, Hiroaki

AU - Azechi, Hiroshi

AU - O'Sullivan, Gerry

PY - 2014/8

Y1 - 2014/8

N2 - We demonstrate high conversion efficiency for extreme ultraviolet (EUV) emission at 6.5-6.7nm from multiple laser beam-produced onedimensional spherical plasmas. Multiply charged-state ions produce strong resonance emission lines, which combine to yield intense unresolved transition arrays (UTAs) in Gd, Tb, and Mo. At an optimum laser intensity of 1 × 1012W/cm 2, which is estimated to yield an electron temperature of around 100 eV, the maximum in-band EUV conversion efficiency (CE) was observed to be 0.8%, which is one of the highest values ever reported due to the reduction of plasma expansion loss.

AB - We demonstrate high conversion efficiency for extreme ultraviolet (EUV) emission at 6.5-6.7nm from multiple laser beam-produced onedimensional spherical plasmas. Multiply charged-state ions produce strong resonance emission lines, which combine to yield intense unresolved transition arrays (UTAs) in Gd, Tb, and Mo. At an optimum laser intensity of 1 × 1012W/cm 2, which is estimated to yield an electron temperature of around 100 eV, the maximum in-band EUV conversion efficiency (CE) was observed to be 0.8%, which is one of the highest values ever reported due to the reduction of plasma expansion loss.

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Efficient extreme ultraviolet emission from one-dimensional spherical plasmas produced by multiple lasers

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