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Electrical and Physical Characterization of Remote Plasma Oxidized HfO2Gate Dielectrics
Kazuhiko Yamamoto, Wim Deweerd, Marc Aoulaiche, Michel Houssa, Stefan De Gendt, Sadayoshi Horii, Misayuki Asai, Atsushi Sano, Shigenori Hayashi, Masaaki Niwa
Research output: Contribution to journal › Article › peer-review
6
Citations
(Scopus)