Electrical and structural properties of TiO2- thin film with oxygen vacancies prepared by RF magnetron sputtering using oxygen radical

Kinya Kawamura, Naoya Suzuki, Takashi Tsuchiya, Yuichi Shimazu, Makoto Minohara, Masaki Kobayashi, Koji Horiba, Hiroshi Kumigashira, Tohru Higuchi

Research output: Contribution to journal › Article › peer-review

5 Citations (Scopus)

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