TY - GEN
T1 - Electrical resistance change with crystallization in Si-Te amorphous thin films
AU - Saito, Yuta
AU - Sutou, Yuji
AU - Koike, Junichi
PY - 2010
Y1 - 2010
N2 - The electrical resistance change of amorphous SixTe 100-x (x: 10-23) films during heating was investigated by a two-point probe method. The SixTe100-x films showed two-stage crystallization processes. The film was firstly crystallized to Te and subsequently crystallized to Si2Te3 with an electrical resistance drop. The first crystallization temperature Tx 1st slightly increased with increasing Si content, while the second crystallization temperature Tx2nd was independent on the composition and was a constant temperature of 310°C. In all films, the electrical resistance once increased in the temperature range from 250 to 295°C before the crystallization of the Si2Te3. This temporal resistance increase could be explained by considering a formation of high-resistivity Si-rich amorphous phase.
AB - The electrical resistance change of amorphous SixTe 100-x (x: 10-23) films during heating was investigated by a two-point probe method. The SixTe100-x films showed two-stage crystallization processes. The film was firstly crystallized to Te and subsequently crystallized to Si2Te3 with an electrical resistance drop. The first crystallization temperature Tx 1st slightly increased with increasing Si content, while the second crystallization temperature Tx2nd was independent on the composition and was a constant temperature of 310°C. In all films, the electrical resistance once increased in the temperature range from 250 to 295°C before the crystallization of the Si2Te3. This temporal resistance increase could be explained by considering a formation of high-resistivity Si-rich amorphous phase.
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U2 - 10.1557/proc-1251-h06-07
DO - 10.1557/proc-1251-h06-07
M3 - Conference contribution
AN - SCOPUS:79951997467
SN - 9781617822186
T3 - Materials Research Society Symposium Proceedings
SP - 99
EP - 104
BT - Phase-Change Materials for Memory and Reconfigurable Electronics Applications
PB - Materials Research Society
ER -