TY - GEN
T1 - Electrically driven ion transport in nanopores fabricated by metal assisted chemical etching method
AU - Van Toan, Nguyen
AU - Inomata, Naoki
AU - Toda, Masaya
AU - Ono, Takahito
N1 - Funding Information:
Part of this work was performed in the Micro/Nanomachining Research Education Center (MNC) of Tohoku University, Sendai, Japan. This work was supported in part by JSPS KAKENHI for Young Scientists B (Grant number: 17K14095), and also supported in part by Grants-in-Aid for Scientific Research -KAKENHI-(Grant number: 16H01376).
Publisher Copyright:
© 2018 IEEE.
PY - 2018/4/24
Y1 - 2018/4/24
N2 - This work reports the electrically driven ion transport in nanopores fabricated by a metal assisted chemical etching (MACE) method. The nanopores with approximate 15 nm diameter and 200 μm height were successful produced by MACE. Ion transport through nanopores was observed and could be controlled by application of gate voltages to nanopores.
AB - This work reports the electrically driven ion transport in nanopores fabricated by a metal assisted chemical etching (MACE) method. The nanopores with approximate 15 nm diameter and 200 μm height were successful produced by MACE. Ion transport through nanopores was observed and could be controlled by application of gate voltages to nanopores.
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U2 - 10.1109/MEMSYS.2018.8346791
DO - 10.1109/MEMSYS.2018.8346791
M3 - Conference contribution
AN - SCOPUS:85046997937
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 1253
EP - 1256
BT - 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018
Y2 - 21 January 2018 through 25 January 2018
ER -