This paper presents electrochemical etching characteristics of shape memory alloy (SMA) using new electrolytes of inorganic salt in alcohol, in comparison with conventional H2SO4-methanol solution. Pattern etching of SMA sheets could be carried out in the electrolyte solutions using LiCl and NH4Cl. Especially in the case of the 1mol/l LiCl -ethanol, good etching properties such as controllable low etch rate, uniform etching depth and flat etched surface were obtained. The etch factor (=etching depth/side etching width) was 1.5 in 1mol/l LiCl-ethanol and 2.0 in 0.1mol/l LiCl-ethanol. Throughout etching could be carried out by using a backside dummy metal. This etching technique has been applied to the micromachining of SMA sheet and SMA pipe for fabrication of actuators.
|Number of pages||4|
|Journal||Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)|
|Publication status||Published - 2002|