Electromagentical excitation and induced electromotive voltage sensing silicon angular rate sensor

Jae joon Choi; Kazuyuki Minam; Masayoshi Esashi

doi:10.1541/ieejsmas.118.641

Electromagentical excitation and induced electromotive voltage sensing silicon angular rate sensor

Jae joon Choi, Kazuyuki Minam, Masayoshi Esashi

Micro System Integration Center (μSIC)

Research output: Contribution to journal › Article › peer-review

Abstract

A bulk-micromachined silicon angular rate sensor has been developed. Electromagnetic excitation is adopted for driving its resonator with a large amplitude vibration (70μm). The induced vibration by the Coriolis’ force is detected by electromotive voltage. The sensor is composed of a silicon-glass-magnet structure and only three masks are needed for this process. The sensitivity of this sensor was 233μV/(deg./sec) and highly sensitive and low cost silicon angular rate is achieved.

Original language	English
Pages (from-to)	641-646
Number of pages	6
Journal	IEEJ Transactions on Sensors and Micromachines
Volume	118
Issue number	12
DOIs	https://doi.org/10.1541/ieejsmas.118.641
Publication status	Published - 1998

ASJC Scopus subject areas

Mechanical Engineering
Electrical and Electronic Engineering

Access to Document

10.1541/ieejsmas.118.641

Cite this

@article{5f8160b2d844491aaa433e5d6625e48c,

title = "Electromagentical excitation and induced electromotive voltage sensing silicon angular rate sensor",

abstract = "A bulk-micromachined silicon angular rate sensor has been developed. Electromagnetic excitation is adopted for driving its resonator with a large amplitude vibration (70μm). The induced vibration by the Coriolis{\textquoteright} force is detected by electromotive voltage. The sensor is composed of a silicon-glass-magnet structure and only three masks are needed for this process. The sensitivity of this sensor was 233μV/(deg./sec) and highly sensitive and low cost silicon angular rate is achieved.",

author = "Choi, {Jae joon} and Kazuyuki Minam and Masayoshi Esashi",

year = "1998",

doi = "10.1541/ieejsmas.118.641",

language = "English",

volume = "118",

pages = "641--646",

journal = "IEEJ Transactions on Sensors and Micromachines",

issn = "1341-8939",

publisher = "The Institute of Electrical Engineers of Japan",

number = "12",

}

TY - JOUR

T1 - Electromagentical excitation and induced electromotive voltage sensing silicon angular rate sensor

AU - Choi, Jae joon

AU - Minam, Kazuyuki

AU - Esashi, Masayoshi

PY - 1998

Y1 - 1998

N2 - A bulk-micromachined silicon angular rate sensor has been developed. Electromagnetic excitation is adopted for driving its resonator with a large amplitude vibration (70μm). The induced vibration by the Coriolis’ force is detected by electromotive voltage. The sensor is composed of a silicon-glass-magnet structure and only three masks are needed for this process. The sensitivity of this sensor was 233μV/(deg./sec) and highly sensitive and low cost silicon angular rate is achieved.

AB - A bulk-micromachined silicon angular rate sensor has been developed. Electromagnetic excitation is adopted for driving its resonator with a large amplitude vibration (70μm). The induced vibration by the Coriolis’ force is detected by electromotive voltage. The sensor is composed of a silicon-glass-magnet structure and only three masks are needed for this process. The sensitivity of this sensor was 233μV/(deg./sec) and highly sensitive and low cost silicon angular rate is achieved.

UR - http://www.scopus.com/inward/record.url?scp=85024445256&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85024445256&partnerID=8YFLogxK

U2 - 10.1541/ieejsmas.118.641

DO - 10.1541/ieejsmas.118.641

M3 - Article

AN - SCOPUS:85024445256

SN - 1341-8939

VL - 118

SP - 641

EP - 646

JO - IEEJ Transactions on Sensors and Micromachines

JF - IEEJ Transactions on Sensors and Micromachines

IS - 12

ER -

Electromagentical excitation and induced electromotive voltage sensing silicon angular rate sensor

Abstract

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this