TY - GEN
T1 - Electromechanical field concentrations near electrodes in piezoelectric MEMS mirrors
AU - Shindo, Yasuhide
AU - Narita, Fumio
AU - Sato, Koji
PY - 2011
Y1 - 2011
N2 - This paper studies the electromechanical response of piezoelectric MEMS mirrors driven by PZT thin films. The MEMS mirrors consisted of four partially or fully poled PZT unimorphs. The resonance frequency and mirror tilt angle of piezoelectric MEMS mirrors under AC electric fields were analyzed by three dimensional finite element method. The electromechanical field concentrations due to electrodes were also simulated, and the results were discussed in detail. The results for the evaluation of electromechanical fields in the PZT thin films may help MEMS mirror device designers to estimate the fracture risk and to optimize in-service loading conditions.
AB - This paper studies the electromechanical response of piezoelectric MEMS mirrors driven by PZT thin films. The MEMS mirrors consisted of four partially or fully poled PZT unimorphs. The resonance frequency and mirror tilt angle of piezoelectric MEMS mirrors under AC electric fields were analyzed by three dimensional finite element method. The electromechanical field concentrations due to electrodes were also simulated, and the results were discussed in detail. The results for the evaluation of electromechanical fields in the PZT thin films may help MEMS mirror device designers to estimate the fracture risk and to optimize in-service loading conditions.
KW - Electromechanical field concentrations
KW - Finite element method
KW - MEMS
KW - Mesomechanics
KW - Piezoelectric PZT thin films
UR - http://www.scopus.com/inward/record.url?scp=84860009033&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84860009033&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:84860009033
SN - 9780986650444
T3 - AES-ATEMA International Conference Series - Advances and Trends in Engineering Materials and their Applications
SP - 81
EP - 86
BT - Advances and Trends in Engineering Materials and their Applications - Proceedings of AES-ATEMA'2011 7th International Conference
T2 - 7th International Conference on Advances and Trends in Engineering Materials and their Applications, AES-ATEMA'2011
Y2 - 4 July 2011 through 8 July 2011
ER -