Abstract
This paper studies the electromechanical response of piezoelectric MEMS mirrors driven by PZT thin films. The MEMS mirrors consisted of four partially or fully poled PZT unimorphs. The resonance frequency and mirror tilt angle of piezoelectric MEMS mirrors under AC electric fields were analyzed by three dimensional finite element method. The electromechanical field concentrations due to electrodes were also simulated, and the results were discussed in detail.
| Original language | English |
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| Title of host publication | Advances and Trends in Engineering Materials and their Applications - Proceedings of AES-ATEMA'2011 9th International Conference |
| Pages | 293-298 |
| Number of pages | 6 |
| Publication status | Published - 2011 Dec 1 |
| Event | 9th International Conference on Advances and Trends in Engineering Materials and their Applications, AES-ATEMA'2011 - Montreal, QC, Canada Duration: 2011 Aug 1 → 2011 Aug 5 |
Other
| Other | 9th International Conference on Advances and Trends in Engineering Materials and their Applications, AES-ATEMA'2011 |
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| Country/Territory | Canada |
| City | Montreal, QC |
| Period | 11/8/1 → 11/8/5 |
Keywords
- Electromechanical field concentrations
- Finite element method
- MEMS
- Mesomechanics
- Piezoelectric PZT thin films
ASJC Scopus subject areas
- Mechanics of Materials
- Materials Science(all)