TY - JOUR
T1 - Electron Cyclotron Resonance Devices with Permanent Magnets for Production of Large-Diameter Uniform Plasmas
AU - Iizuka, Satoru
AU - Sato, Noriyoshi
PY - 1994/7
Y1 - 1994/7
N2 - A review is presented of experimental devices with permanent magnets for electron cyclotron resonance to produce large-diameter uniform plasmas. The devices are classified into 7 groups depending on device symmetry, magnet arrangement, plasma-drift direction and microwave coupling. Their characteristic points are clarified and the most optimal device construction and arrangement are discussed from a viewpoint of producing uniform plasmas necessary for large-scale plasma processing.
AB - A review is presented of experimental devices with permanent magnets for electron cyclotron resonance to produce large-diameter uniform plasmas. The devices are classified into 7 groups depending on device symmetry, magnet arrangement, plasma-drift direction and microwave coupling. Their characteristic points are clarified and the most optimal device construction and arrangement are discussed from a viewpoint of producing uniform plasmas necessary for large-scale plasma processing.
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U2 - 10.1143/JJAP.33.4221
DO - 10.1143/JJAP.33.4221
M3 - Article
AN - SCOPUS:0028463427
SN - 0021-4922
VL - 33
SP - 4221
JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
IS - 7S
ER -