Electron energy distributions in inductively coupled plasma: Comparison of chlorine discharge with argon discharge

Shigeru Yonemura; Kenichi Nanbu; Kazuma Sakai

doi:10.1143/jjap.41.6189

Electron energy distributions in inductively coupled plasma: Comparison of chlorine discharge with argon discharge

Shigeru Yonemura, Kenichi Nanbu, Kazuma Sakai

Research output: Contribution to journal › Article › peer-review

8 Citations (Scopus)

Abstract

The characteristics of the electron energy distribution functions (EEDFs) in inductively-coupled discharges of chlorine and argon gases are studied numerically. The EEDFs in atomic gases such as Ar and Cl show the three-temperature distribution with depletion in the high-energy region and enhancement in the low-energy region. By contrast, the EEDF for Cl₂ shows the bi-Maxwellian distribution close to the Maxwellian one. The reason for this difference is explained by the difference of electronic inelastic collision cross sections between atomic and molecular gases. The EEDFs obtained in the present simulation agree with the earlier experimental results qualitatively.

Original language	English
Pages (from-to)	6189-6196
Number of pages	8
Journal	Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume	41
Issue number	10
DOIs	https://doi.org/10.1143/jjap.41.6189
Publication status	Published - 2002 Oct
Externally published	Yes

Keywords

Argon plasma
Chlorine plasma
Electron energy distribution
Inductively coupled plasma
Particle-in-cell/Monte Carlo method

ASJC Scopus subject areas

Engineering(all)
Physics and Astronomy(all)

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10.1143/jjap.41.6189

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Electron energy distributions in inductively coupled plasma: Comparison of chlorine discharge with argon discharge. / Yonemura, Shigeru; Nanbu, Kenichi; Sakai, Kazuma.
In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, Vol. 41, No. 10, 10.2002, p. 6189-6196.

Research output: Contribution to journal › Article › peer-review

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title = "Electron energy distributions in inductively coupled plasma: Comparison of chlorine discharge with argon discharge",

abstract = "The characteristics of the electron energy distribution functions (EEDFs) in inductively-coupled discharges of chlorine and argon gases are studied numerically. The EEDFs in atomic gases such as Ar and Cl show the three-temperature distribution with depletion in the high-energy region and enhancement in the low-energy region. By contrast, the EEDF for Cl2 shows the bi-Maxwellian distribution close to the Maxwellian one. The reason for this difference is explained by the difference of electronic inelastic collision cross sections between atomic and molecular gases. The EEDFs obtained in the present simulation agree with the earlier experimental results qualitatively.",

keywords = "Argon plasma, Chlorine plasma, Electron energy distribution, Inductively coupled plasma, Particle-in-cell/Monte Carlo method",

author = "Shigeru Yonemura and Kenichi Nanbu and Kazuma Sakai",

year = "2002",

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T2 - Comparison of chlorine discharge with argon discharge

AU - Yonemura, Shigeru

AU - Nanbu, Kenichi

AU - Sakai, Kazuma

PY - 2002/10

Y1 - 2002/10

N2 - The characteristics of the electron energy distribution functions (EEDFs) in inductively-coupled discharges of chlorine and argon gases are studied numerically. The EEDFs in atomic gases such as Ar and Cl show the three-temperature distribution with depletion in the high-energy region and enhancement in the low-energy region. By contrast, the EEDF for Cl2 shows the bi-Maxwellian distribution close to the Maxwellian one. The reason for this difference is explained by the difference of electronic inelastic collision cross sections between atomic and molecular gases. The EEDFs obtained in the present simulation agree with the earlier experimental results qualitatively.

AB - The characteristics of the electron energy distribution functions (EEDFs) in inductively-coupled discharges of chlorine and argon gases are studied numerically. The EEDFs in atomic gases such as Ar and Cl show the three-temperature distribution with depletion in the high-energy region and enhancement in the low-energy region. By contrast, the EEDF for Cl2 shows the bi-Maxwellian distribution close to the Maxwellian one. The reason for this difference is explained by the difference of electronic inelastic collision cross sections between atomic and molecular gases. The EEDFs obtained in the present simulation agree with the earlier experimental results qualitatively.

KW - Argon plasma

KW - Chlorine plasma

KW - Electron energy distribution

KW - Inductively coupled plasma

KW - Particle-in-cell/Monte Carlo method

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Electron energy distributions in inductively coupled plasma: Comparison of chlorine discharge with argon discharge

Abstract

Keywords

ASJC Scopus subject areas

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