TY - JOUR
T1 - Electronic and atomic structure modifications of copper nitride films by ion impact and phase separation
AU - Matsunami, N.
AU - Kakiuchida, H.
AU - Tazawa, M.
AU - Sataka, M.
AU - Sugai, H.
AU - Okayasu, S.
N1 - Funding Information:
This work has been partly supported by Inter-organization Atomic Energy Research Program, Japan. RBS were performed by using AN Van de Graaff accelerator at Nagoya University. Low-energy ion and high-energy ions were obtained by using 200 kV at Nagoya University and TANDEM accelerator at Japan Atomic Energy Agency, Tokai.
PY - 2009/8/15
Y1 - 2009/8/15
N2 - We have studied electronic and atomic structure modifications of Cu3N films under 100 keV Ne and 100 MeV Xe ion impact. Cu3N films were prepared on R(11-2 surface)-cut-Al2O3 substrates at 250 °C by using a RF-magnetron sputter deposition method. X-ray diffraction (XRD) shows that unirradiated films are polycrystalline with (1 0 0) orientation of cubic structure. We find that the electrical resistivity (∼10 Ω cm before ion impact) decreases by more than two orders of magnitude after the Ne impact at a fluence of ∼1013 cm-2, where no Cu phase separation is observed. For further ion impact (larger than ∼1015 cm-2), XRD shows Cu diffraction peak (Cu phase separation), and the resistivity decreases further (three orders of magnitude). Decomposition and phase separation are discussed based on these results, as well as temperature dependence of the resistivity and optical absorption. The results of 100 MeV Xe ion impact are compared with those of Ne ion impact.
AB - We have studied electronic and atomic structure modifications of Cu3N films under 100 keV Ne and 100 MeV Xe ion impact. Cu3N films were prepared on R(11-2 surface)-cut-Al2O3 substrates at 250 °C by using a RF-magnetron sputter deposition method. X-ray diffraction (XRD) shows that unirradiated films are polycrystalline with (1 0 0) orientation of cubic structure. We find that the electrical resistivity (∼10 Ω cm before ion impact) decreases by more than two orders of magnitude after the Ne impact at a fluence of ∼1013 cm-2, where no Cu phase separation is observed. For further ion impact (larger than ∼1015 cm-2), XRD shows Cu diffraction peak (Cu phase separation), and the resistivity decreases further (three orders of magnitude). Decomposition and phase separation are discussed based on these results, as well as temperature dependence of the resistivity and optical absorption. The results of 100 MeV Xe ion impact are compared with those of Ne ion impact.
KW - CuN
KW - Decomposition
KW - Ion impact
KW - Phase separation
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U2 - 10.1016/j.nimb.2009.05.037
DO - 10.1016/j.nimb.2009.05.037
M3 - Article
AN - SCOPUS:68349160585
SN - 0168-583X
VL - 267
SP - 2653
EP - 2656
JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
IS - 16
ER -