TY - GEN
T1 - Electroplating of neodymium iron alloys
AU - Kurth, Florian
AU - Froemel, Joerg
AU - Tanaka, Shuji
AU - Esashi, Masayoshi
AU - Gessner, Thomas
N1 - Publisher Copyright:
© 2016 IEEE.
PY - 2016/11/28
Y1 - 2016/11/28
N2 - Aim is to show how to make neodymium iron alloys available for MEMS process by electroplating used for permanent magnetic material. Because of the low electrochemical potential of neodymium, three different deposition methods were investigated: Electroplating from aqueous solvent, from non-aqueous solvent and molecular plating. All results shows as brittle deposited film. Due to the high oxidation behavior of neodymium a high amount of oxygen could be observed, which indicates a complete oxidized film.
AB - Aim is to show how to make neodymium iron alloys available for MEMS process by electroplating used for permanent magnetic material. Because of the low electrochemical potential of neodymium, three different deposition methods were investigated: Electroplating from aqueous solvent, from non-aqueous solvent and molecular plating. All results shows as brittle deposited film. Due to the high oxidation behavior of neodymium a high amount of oxygen could be observed, which indicates a complete oxidized film.
UR - http://www.scopus.com/inward/record.url?scp=85007189809&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85007189809&partnerID=8YFLogxK
U2 - 10.1109/NEMS.2016.7758278
DO - 10.1109/NEMS.2016.7758278
M3 - Conference contribution
AN - SCOPUS:85007189809
T3 - 2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016
SP - 405
EP - 408
BT - 2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 11th IEEE Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016
Y2 - 17 April 2016 through 20 April 2016
ER -